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|Author(s):||Uwe Arz; Dylan F. Williams;|
|Title:||Applications of Calibration Comparison in On-wafer Measurement|
|Published:||August 17, 2002|
|Abstract:||In this paper we discuss several applications of calibration comparison in on-wafer measurement. This technique can be understood as an abstraction of the well-known two-tier deembedding scheme used in test-fixture characterization. The applications presented here include the assessment of accuracy of a given on-wafer calibration with respect to a benchmark calibration, the compensation for substrate permittivity in probe-tip calibration, the determination of characteristic impedance in planar transmission line structures, and multiport calibration.|
|Conference:||2002 URSI General Assembly|
|Pages:||pp. 1 - 3|
|Dates:||August 17-24, 2002|
|Keywords:||calibration comparison,on-wafer measurement,planar transmission lines|
|Research Areas:||Microwave Measurement Services|
|PDF version:||Click here to retrieve PDF version of paper (97KB)|