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Publication Citation: Applications of Calibration Comparison in On-wafer Measurement

NIST Authors in Bold

Author(s): Uwe Arz; Dylan F. Williams;
Title: Applications of Calibration Comparison in On-wafer Measurement
Published: August 17, 2002
Abstract: In this paper we discuss several applications of calibration comparison in on-wafer measurement. This technique can be understood as an abstraction of the well-known two-tier deembedding scheme used in test-fixture characterization. The applications presented here include the assessment of accuracy of a given on-wafer calibration with respect to a benchmark calibration, the compensation for substrate permittivity in probe-tip calibration, the determination of characteristic impedance in planar transmission line structures, and multiport calibration.
Conference: 2002 URSI General Assembly
Pages: pp. 1 - 3
Location: Maastricht, NL
Dates: August 17-24, 2002
Keywords: calibration comparison,on-wafer measurement,planar transmission lines
Research Areas: Microwave Measurement Services
PDF version: PDF Document Click here to retrieve PDF version of paper (97KB)