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PUBLICATIONS

Applications of Calibration Comparison in On-wafer Measurement

Published

Author(s)

Uwe Arz, Dylan Williams

Abstract

In this paper we discuss several applications of calibration comparison in on-wafer measurement. This technique can be understood as an abstraction of the well-known two-tier deembedding scheme used in test-fixture characterization. The applications presented here include the assessment of accuracy of a given on-wafer calibration with respect to a benchmark calibration, the compensation for substrate permittivity in probe-tip calibration, the determination of characteristic impedance in planar transmission line structures, and multiport calibration.
Conference Dates
August 17-24, 2002
Conference Location
Maastricht, 1, NL
Conference Title
2002 URSI General Assembly
Pub Type
Conferences

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Keywords

calibration comparison, on-wafer measurement, planar transmission lines
Electrical / electromagnetic metrology

Citation

Arz, U. and Williams, D. (2002), Applications of Calibration Comparison in On-wafer Measurement, 2002 URSI General Assembly, Maastricht, 1, NL, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=33081 (Accessed October 21, 2025)

Issues

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Created August 16, 2002, Updated October 12, 2021
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