| Author(s): |
Uwe Arz; Dylan F. Williams; |
| Title: |
Applications of Calibration Comparison in On-wafer Measurement |
| Published: |
August 17, 2002 |
| Abstract: |
In this paper we discuss several applications of calibration comparison in on-wafer measurement. This technique can be understood as an abstraction of the well-known two-tier deembedding scheme used in test-fixture characterization. The applications presented here include the assessment of accuracy of a given on-wafer calibration with respect to a benchmark calibration, the compensation for substrate permittivity in probe-tip calibration, the determination of characteristic impedance in planar transmission line structures, and multiport calibration. |
| Conference: |
2002 URSI General Assembly |
| Location: |
Maastricht, NL |
| Dates: |
August 17-24, 2002 |
| Keywords: |
calibration comparison;on-wafer measurement;planar transmission lines; |
| Research Areas: |
Microwave Measurement Services |
