@conference{764356,
  author = {Uwe Arz and Dylan Williams},
  title = {Applications of Calibration Comparison in On-wafer Measurement},
  year = {2002},
  month = {2002-08-17 00:08:00},
  publisher = {2002 URSI General Assembly, Maastricht, 1, NL},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=33081},
  language = {en},
}