U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

High Sensitivity Attenuated Total Reflection Fourier Transform Infrared Spectroscopy Study of Ultrathin ZrO2 Films: A Study of Phase Change

Published

Author(s)

Safak Sayan, Deane Chandler-Horowitz, Nhan Van Nguyen, James R. Ehrstein
Citation
Journal of Vacuum Science and Technology A
Volume
26
Issue
2
Pub Type
Journals

Download Paper

Local Download
Semiconductors

Citation

Sayan, S. , Chandler-Horowitz, D. , Nguyen, N. and Ehrstein, J. (2008), High Sensitivity Attenuated Total Reflection Fourier Transform Infrared Spectroscopy Study of Ultrathin ZrO2 Films: A Study of Phase Change, Journal of Vacuum Science and Technology A, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32977 (Accessed April 19, 2024)

Created March 2, 2008, Updated October 12, 2021