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Publication Citation: An Accurate Capacitance-Voltage Measurement Method for Highly Leaky Devices

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Author(s): Yun Wang; Kin P. Cheung; Y.J. Choi; Byoung Hun Lee;
Title: An Accurate Capacitance-Voltage Measurement Method for Highly Leaky Devices
Published: September 01, 2008
Abstract: Accurate CV measurement becomes extremely difficult in advanced CMOS technology due to high level of leakage across the gate dielectric. Recently, a new Time-Domain-Reflectometry (TDR) based CV measurement method was introduced. This new method offers ease of use and high accuracy while able to handle very high level of leakage current. It also allows series resistance and overlap capacitance to be extracted simultaneously and accurately without the need for additional measurement. In this paper, the theoretical basis of the TDR CV method is described in detail. In addition, we include a detailed error analysis to provide a complete documentation of the TDR CV measurement method.
Citation: IEEE Transactions on Electron Devices
Volume: 55
Pages: pp. 2429 - 2442
Keywords: capacitance;CV;thin oxide;time-domain-reflectometry, CMOS
Research Areas: Semiconductors
PDF version: PDF Document Click here to retrieve PDF version of paper (593KB)