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Publication Citation: Semiconductor Microelectronics and Nanoelectronics Programs

NIST Authors in Bold

Author(s): Stephen Knight; Joaquin (. Martinez; Michele L. Buckley;
Title: Semiconductor Microelectronics and Nanoelectronics Programs
Published: July 02, 2007
Abstract: The microelectronics industry supplies vital components to the electronics industry and to the U.S. economy, enabling rapid improvements in productivity and in new high technology growth industries such as electronic commerce and biotechnology. The National Institute of Standards and Technology, NIST, in fulfi lling its mission of strengthening the U.S. economy, works with industry to develop and apply technology, measurements and standards; and applies substantial efforts on behalf of the semiconductor industry and its infrastructure. This report describes the many projects being conducted at NIST that constitute that effort.
Citation: NIST Interagency/Internal Report (NISTIR) - 7426
Keywords: critical dimension,linewidth,microelectronics,nanoelectronics,semiconductor,wafer
Research Areas:
PDF version: PDF Document Click here to retrieve PDF version of paper (5MB)