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|Author(s):||Simone Lee; Thomas M. Wallis; John M. Moreland; Pavel Kabos; Y. C. Lee;|
|Title:||Asymmetric Dielectric Trilayer Cantilever Probe for Calorimetric High-Frequency Field Imaging|
|Published:||February 01, 2007|
|Abstract:||Multimaterial, microelectromechanical systems-based cantilever probes were developed for high-frequency magnetic field imaging. The basic configuration of the probe consists of a cantilever beam fabricated using surface micromachining and bulk microcachining techniques with dielectric silicon nitride and silicon oxide materials on a silicon wafer. A gold patterned metallization at the tip of the cantilever provides a source of eddy current heating due to the perpendicular component of the high-frequency magnetic field. This thermally absorbed power is converted to mechanical deflection by a multimaterials trilayer cantilever system. The deflection is measured with a beam-bounce optical technique employed in atomic force microscopy systems. We discuss the modeling, design, fabrication, and characterization of these field imaging probes.|
|Citation:||Journal of Microelectromechanical Systems|
|Pages:||pp. 78 - 86|
|Keywords:||curvature,high-frequency imaging,microelectromechanical systems (MEMS) cantilever,radio-frequency (RF) probe|
|Research Areas:||Electronics & Telecommunications, Electromagnetics|
|PDF version:||Click here to retrieve PDF version of paper (2MB)|