| Author(s): |
Simone Lee; Thomas M. Wallis; John M. Moreland; Pavel Kabos; Y. C. Lee; |
| Title: |
Asymmetric Dielectric Trilayer Cantilever Probe for Calorimetric High-Frequency Field Imaging |
| Published: |
February 01, 2007 |
| Abstract: |
Multimaterial, microelectromechanical systems-based cantilever probes were developed for high-frequency magnetic field imaging. The basic configuration of the probe consists of a cantilever beam fabricated using surface micromachining and bulk microcachining techniques with dielectric silicon nitride and silicon oxide materials on a silicon wafer. A gold patterned metallization at the tip of the cantilever provides a source of eddy current heating due to the perpendicular component of the high-frequency magnetic field. This thermally absorbed power is converted to mechanical deflection by a multimaterials trilayer cantilever system. The deflection is measured with a beam-bounce optical technique employed in atomic force microscopy systems. We discuss the modeling, design, fabrication, and characterization of these field imaging probes. |
| Citation: |
Journal of Microelectromechanical Systems |
| Volume: |
16 |
| Issue: |
1 |
| Pages: |
pp. 78 - 86 |
| Keywords: |
curvature;high-frequency imaging;microelectromechanical systems (MEMS) cantilever;radio-frequency (RF) probe |
| Research Areas: |
Electronics & Telecommunications, Electromagnetics |
| PDF version: |
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