NIST logo

Publication Citation: Asymmetric Dielectric Trilayer Cantilever Probe for Calorimetric High-Frequency Field Imaging

NIST Authors in Bold

Author(s): Simone Lee; Thomas M. Wallis; John M. Moreland; Pavel Kabos; Y. C. Lee;
Title: Asymmetric Dielectric Trilayer Cantilever Probe for Calorimetric High-Frequency Field Imaging
Published: February 01, 2007
Abstract: Multimaterial, microelectromechanical systems-based cantilever probes were developed for high-frequency magnetic field imaging. The basic configuration of the probe consists of a cantilever beam fabricated using surface micromachining and bulk microcachining techniques with dielectric silicon nitride and silicon oxide materials on a silicon wafer. A gold patterned metallization at the tip of the cantilever provides a source of eddy current heating due to the perpendicular component of the high-frequency magnetic field. This thermally absorbed power is converted to mechanical deflection by a multimaterials trilayer cantilever system. The deflection is measured with a beam-bounce optical technique employed in atomic force microscopy systems. We discuss the modeling, design, fabrication, and characterization of these field imaging probes.
Citation: Journal of Microelectromechanical Systems
Volume: 16
Issue: 1
Pages: pp. 78 - 86
Keywords: curvature;high-frequency imaging;microelectromechanical systems (MEMS) cantilever;radio-frequency (RF) probe
Research Areas: Electronics & Telecommunications, Electromagnetics
PDF version: PDF Document Click here to retrieve PDF version of paper (2MB)