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Publication Citation: Metrology in the Nanoelectronics Era: Collaborative Innovation Between NIST and Industry

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Author(s): David G. Seiler; John S. Suehle;
Title: Metrology in the Nanoelectronics Era: Collaborative Innovation Between NIST and Industry
Published: November 01, 2006
Abstract: This special article in Semiconductor International discusses NIST's role in metrology for the semiconductor industry as it moves to the nanoscale regime.
Citation: Semiconductor International
Pages: pp. 92 - 92
Research Areas: Advanced Materials