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Publication Citation: Semiconductor Microelectornics and Nanoelectronics Programs

NIST Authors in Bold

Author(s): Stephen Knight; Joaquin (. Martinez; Michele L. Buckley;
Title: Semiconductor Microelectornics and Nanoelectronics Programs
Published: July 05, 2006
Abstract: The microelectronics industry supplies vital components to the electronics industry and to the U.S. economy, enabling rapid improvements in productivity and in new high technology growth industries such as electronic commerce and biotechnology. The National Institute of Standards and Technology (NIST), in fulfillings its mission of strenghtening the U.S. economy, works with industry to develop and apply technology, measurements and standards; and applies substantial efforts on behalf of the semiconductor industry and ints infrasturture. This report describes the many projects being conducted at NIST the constitute that effort.
Citation: NIST Interagency/Internal Report (NISTIR) - 7321
Keywords: interconnect and packaging,lithography,microelectronics,modeling,semiconductor,thin film,wafer characterization
Research Areas:
PDF version: PDF Document Click here to retrieve PDF version of paper (18MB)