| Author(s): |
Qiliang Li; Sang-Mo Koo; Curt A. Richter; Monica D. Edelstein; John E. Bonevich; Joseph J. Kopanski; John S. Suehle; Eric M. Vogel; |
| Title: |
Precise Manipulation and Alignment of Single Nanowire |
| Published: |
March 02, 2007 |
| Abstract: |
Nanowires and nanotubes are being intensively investigated for nanoelectronic transport applications. The integration of such nanostructures into circuitry requires a simple, high-efficiency and low-cost strategy. Here we develop a single nanowire manipulating system to precisely manipulate and align the nanowire individually. We show that a single nanowire can be picked up through electromechanical force, transferred over different substrates and placed onto a pre-defined location. In addition, we have developed compatible fabrication processes to pattern all the aligned nanowires using one-level optical mask alignment. Representative test structures and a simple silicon nanowire transistor have been fabricated and demonstrated based on this approach. |
| Citation: |
Nano Letters |
| Volume: |
6 |
| Issue: |
2 |
| Pages: |
pp. 256 - 262 |
| Keywords: |
alignment;nanoelectronics;silicon nanowire;transistor |
| Research Areas: |
Nanoelectronics and Nanoscale Electronics |
| PDF version: |
 Click here to retrieve PDF version of paper (2MB) |
