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Publication Citation: Precise Manipulation and Alignment of Single Nanowire

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Author(s): Qiliang Li; Sang-Mo Koo; Curt A. Richter; Monica D. Edelstein; John E. Bonevich; Joseph J. Kopanski; John S. Suehle; Eric M. Vogel;
Title: Precise Manipulation and Alignment of Single Nanowire
Published: March 02, 2007
Abstract: Nanowires and nanotubes are being intensively investigated for nanoelectronic transport applications. The integration of such nanostructures into circuitry requires a simple, high-efficiency and low-cost strategy. Here we develop a single nanowire manipulating system to precisely manipulate and align the nanowire individually. We show that a single nanowire can be picked up through electromechanical force, transferred over different substrates and placed onto a pre-defined location. In addition, we have developed compatible fabrication processes to pattern all the aligned nanowires using one-level optical mask alignment. Representative test structures and a simple silicon nanowire transistor have been fabricated and demonstrated based on this approach.
Citation: Nano Letters
Volume: 6
Issue: 2
Pages: pp. 256 - 262
Keywords: alignment;nanoelectronics;silicon nanowire;transistor
Research Areas: Nanoelectronics and Nanoscale Electronics
PDF version: PDF Document Click here to retrieve PDF version of paper (2MB)