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Publication Citation: On-Chip Electrostatic Discharge Protection for CMOS Gas Sensor Systems-on-a-Chip (SoC)

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Author(s): Javier Salcedo; Juin J. Liou; Muhammad Y. Afridi; Allen R. Hefner Jr;
Title: On-Chip Electrostatic Discharge Protection for CMOS Gas Sensor Systems-on-a-Chip (SoC)
Published: August 01, 2006
Abstract: An on-chip Electrostatic Discharge (ESD) protection scheme is demonstrated for MicroElectroMechanical Systems (MEMS)-based Embedded Sensor (ES) System-on-a-Chip (SoC). The ESD protection scheme is implemented with ground-referenced multifinger thyristor-type devices optimized for 1) the Input/Output (I/O) protection, 2) the power supply clamp, and 3) the protection at the internal sensors? electrodes during the micromachining process. The ESD protection structure shows a low leakage current in the order of 10-11 Amps at the SoC operating voltage, and high on-state conductance I-V characteristics for bipolar ESD protection.
Citation: Microelectronics Reliability
Volume: 46
Issue: 8
Pages: pp. 1285 - 1294
Keywords: Electrostatic Discharge (ESD);Gas Sensor System on-a-Chip (SoC);MicroElectroMechanical Systems (MEMS);Thyristor.
Research Areas: Semiconductors