Take a sneak peek at the new NIST.gov and let us know what you think!
(Please note: some content may not be complete on the beta site.).
NIST Authors in Bold
|Author(s):||Muhammad Y. Afridi; Allen R. Hefner Jr.; David W. Berning; Colleen E. Hood; Ankush Varma; Bruce Jacob; Stephen Semancik;|
|Title:||Mems-Based Embedded Sensor Virtual Components for SOC|
|Published:||June 24, 2004|
|Abstract:||The design and implementation of a monolithic MEMS-based (Micro Electro Mechanical Systems) gas sensor virtual component is described. A bulk micromachining technique is used to create suspended microhotplate structures. The thermal properties of the microhotplates include a one-millisecond thermal time constant and a 10 'C/mW thermal efficiency. Tin oxide (SnO2) and titanium oxide (TiO2) sensing films are grown over gold sensing electrodes using low-pressure chemical vapor deposition (LPCVD). Gas sensor characterization results are presented showing isothermal response to carbon monoxide molecules with detection sensitivity better than 100 nanomoles/mole.|
|Pages:||pp. 1777 - 1781|
|Keywords:||gas sensor,MEMS,monolithic,SoC,virtual component|
|Research Areas:||Electronics & Telecommunications|
|PDF version:||Click here to retrieve PDF version of paper (445KB)|