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Publication Citation: Mems-Based Embedded Sensor Virtual Components for SOC

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Author(s): Muhammad Y. Afridi; Allen R. Hefner Jr; David W. Berning; Colleen E. Hood; Ankush Varma; Bruce Jacob; Stephen Semancik;
Title: Mems-Based Embedded Sensor Virtual Components for SOC
Published: June 24, 2004
Abstract: The design and implementation of a monolithic MEMS-based (Micro Electro Mechanical Systems) gas sensor virtual component is described. A bulk micromachining technique is used to create suspended microhotplate structures. The thermal properties of the microhotplates include a one-millisecond thermal time constant and a 10 'C/mW thermal efficiency. Tin oxide (SnO2) and titanium oxide (TiO2) sensing films are grown over gold sensing electrodes using low-pressure chemical vapor deposition (LPCVD). Gas sensor characterization results are presented showing isothermal response to carbon monoxide molecules with detection sensitivity better than 100 nanomoles/mole.
Citation: Solid-State Electronics
Volume: 48
Pages: pp. 1777 - 1781
Keywords: gas sensor;MEMS;monolithic;SoC;virtual component
Research Areas: Electronics & Telecommunications
PDF version: PDF Document Click here to retrieve PDF version of paper (445KB)