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|Author(s):||David A. Wollman; Sae Woo Nam; Gene C. Hilton; Kent D. Irwin; David A. Rudman; Norman F. Bergren; Steven Deiker; John M. Martinis; Martin Huber; Dale E. Newbury;|
|Title:||Low Voltage Microanalysis using Microcalorimeter EDS|
|Published:||January 01, 2001|
|Abstract:||We present the current performance of the prototype high-resolution microcalorimeter energy-dispersive spectrometer (υcal EDS) developed at NIST for x-ray microanalysis. In particular, the low-energy υcal EDS designed for operation in the energy range from 0.2 keV to 2 keV, offers significant advantages for low-beam voltage (high-spatial-resolution) x-ray microanalysis for critical applications in the semiconductor industry such as particle analysis. We present several examples in which the low-energy υcal EDS has successfully solved problems important to the semiconductor industry, including analyses of small contaminant particles (Al, Al oxide, Cu) and thin films (TiN, TiO2, o.5 wt.% Cu in Al). We also describe the future development of a large-format microcalorimeter array with significantly improved total effective area and total count rate.|
|Proceedings:||Proc., 2000 Intl Conf. Characterization & Metrology for ULSI Tech.|
|Pages:||pp. 506 - 510|
|Dates:||June 26-29, 2000|
|Keywords:||microcalorimeter array,microcalorimeter energy-dispersive spectrometer,particle analysis,x-ray microanalysis|
|Research Areas:||Nanoelectronics and Nanoscale Electronics|