| Author(s): |
David A. Wollman; Sae Woo Nam; Gene C. Hilton; Kent D. Irwin; David A. Rudman; Norman F. Bergren; Steven Deiker; John M. Martinis; Martin Huber; Dale E. Newbury; |
| Title: |
Low Voltage Microanalysis using Microcalorimeter EDS |
| Published: |
January 01, 2001 |
| Abstract: |
We present the current performance of the prototype high-resolution microcalorimeter energy-dispersive spectrometer (υcal EDS) developed at NIST for x-ray microanalysis. In particular, the low-energy υcal EDS designed for operation in the energy range from 0.2 keV to 2 keV, offers significant advantages for low-beam voltage (high-spatial-resolution) x-ray microanalysis for critical applications in the semiconductor industry such as particle analysis. We present several examples in which the low-energy υcal EDS has successfully solved problems important to the semiconductor industry, including analyses of small contaminant particles (Al, Al oxide, Cu) and thin films (TiN, TiO2, o.5 wt.% Cu in Al). We also describe the future development of a large-format microcalorimeter array with significantly improved total effective area and total count rate. |
| Proceedings: |
Proc., 2000 Intl Conf. Characterization & Metrology for ULSI Tech. |
| Pages: |
pp. 506 - 510 |
| Location: |
Gaithersburg, MD |
| Dates: |
June 26-29, 2000 |
| Keywords: |
microcalorimeter array;microcalorimeter energy-dispersive spectrometer;particle analysis;x-ray microanalysis; |
| Research Areas: |
Nanoelectronics and Nanoscale Electronics |
