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Publication Citation: Low Voltage Microanalysis using Microcalorimeter EDS

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Author(s): David A. Wollman; Sae Woo Nam; Gene C. Hilton; Kent D. Irwin; David A. Rudman; Norman F. Bergren; Steven Deiker; John M. Martinis; Martin Huber; Dale E. Newbury;
Title: Low Voltage Microanalysis using Microcalorimeter EDS
Published: January 01, 2001
Abstract: We present the current performance of the prototype high-resolution microcalorimeter energy-dispersive spectrometer (υcal EDS) developed at NIST for x-ray microanalysis. In particular, the low-energy υcal EDS designed for operation in the energy range from 0.2 keV to 2 keV, offers significant advantages for low-beam voltage (high-spatial-resolution) x-ray microanalysis for critical applications in the semiconductor industry such as particle analysis. We present several examples in which the low-energy υcal EDS has successfully solved problems important to the semiconductor industry, including analyses of small contaminant particles (Al, Al oxide, Cu) and thin films (TiN, TiO2, o.5 wt.% Cu in Al). We also describe the future development of a large-format microcalorimeter array with significantly improved total effective area and total count rate.
Proceedings: Proc., 2000 Intl Conf. Characterization & Metrology for ULSI Tech.
Pages: pp. 506 - 510
Location: Gaithersburg, MD
Dates: June 26-29, 2000
Keywords: microcalorimeter array;microcalorimeter energy-dispersive spectrometer;particle analysis;x-ray microanalysis;
Research Areas: Nanoelectronics and Nanoscale Electronics