Publication Citation
NIST Authors in Bold
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| Author(s): | J R. Roberts; James K. Olthoff; Mark A. Sobolewski; Richard J. Van Brunt; James R. Whetstone; S. Djurovic; |
|---|---|
| Title: | Diagnostic Measurements in RF Plasmas for Materials Processing |
| Published: | July 01, 1992 |
| Abstract: | |
| Proceedings: | Proc. 8th American Physical Soc. Topical Conf. on Atomic Processes in Plasmas |
| Pages: | pp. 157 - 168 |
| Location: | Portland, ME |
| Dates: | August 25-29, 1991 |
| Research Areas: | Electronics & Telecommunications |
| PDF version: |  Click here to retrieve PDF version of paper (6MB) |