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Publication Citation: Diagnostic Measurements in RF Plasmas for Materials Processing

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Author(s): J R. Roberts; James K. Olthoff; Mark A. Sobolewski; Richard J. Van Brunt; James R. Whetstone; S. Djurovic;
Title: Diagnostic Measurements in RF Plasmas for Materials Processing
Published: July 01, 1992
Abstract:
Proceedings: Proc. 8th American Physical Soc. Topical Conf. on Atomic Processes in Plasmas
Pages: pp. 157 - 168
Location: Portland, ME
Dates: August 25-29, 1991
Research Areas: Electronics & Telecommunications
PDF version: PDF Document Click here to retrieve PDF version of paper (7MB)