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Publication Citation: Off-Axis Measurements of Ion Kinetic Energies in RF Plasmas

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Author(s): S. B. Radovanov; James K. Olthoff; Richard J. Van Brunt;
Title: Off-Axis Measurements of Ion Kinetic Energies in RF Plasmas
Published: July 01, 1991
Abstract:
Proceedings: Proc. of the XX Intl. Conf. on Phenomena in Ionized Gases
Pages: pp. 835 - 836
Location: Barga, IT
Dates: July 8-12, 1991
Research Areas: Electronics & Telecommunications
PDF version: PDF Document Click here to retrieve PDF version of paper (2MB)