Publication Citation
NIST Authors in Bold
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| Author(s): | S. B. Radovanov; James K. Olthoff; Richard J. Van Brunt; |
|---|---|
| Title: | Off-Axis Measurements of Ion Kinetic Energies in RF Plasmas |
| Published: | July 01, 1991 |
| Abstract: | |
| Proceedings: | Proc. of the XX Intl. Conf. on Phenomena in Ionized Gases |
| Pages: | pp. 835 - 836 |
| Location: | Barga, IT |
| Dates: | July 8-12, 1991 |
| Research Areas: | Electronics & Telecommunications |
| PDF version: |  Click here to retrieve PDF version of paper (1MB) |