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|Author(s):||Loucas G. Christophorou; James K. Olthoff;|
|Title:||Electron Interactions with CF3I|
|Published:||January 01, 2000|
|Abstract:||Low-energy electron collision data for the plasma processing gas CF3I are sparse. Limited cross section data are available only for total and differential elastic electron scattering, electron-impact ionization, and electron attachment processes. These data are synthesized, assessed, and discussed in this paper. There is a need for further scrutiny of these data and for measurements of the cross sections of the other main electron-collision processes. There is a need also for measurements of the electron transport, ionization, and attachment coefficients of this molecule|
|Citation:||J. Phys. & Chem. Ref. Data (JPCRD) -|
|Pages:||pp. 553 - 570|
|Research Areas:||Electronics & Telecommunications|
|PDF version:||Click here to retrieve PDF version of paper (7MB)|