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Publication Citation: Electron Interactions with CF3I

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Author(s): Loucas G. Christophorou; James K. Olthoff;
Title: Electron Interactions with CF3I
Published: January 01, 2000
Abstract: Low-energy electron collision data for the plasma processing gas CF3I are sparse. Limited cross section data are available only for total and differential elastic electron scattering, electron-impact ionization, and electron attachment processes. These data are synthesized, assessed, and discussed in this paper. There is a need for further scrutiny of these data and for measurements of the cross sections of the other main electron-collision processes. There is a need also for measurements of the electron transport, ionization, and attachment coefficients of this molecule
Citation: J. Phys. & Chem. Ref. Data (JPCRD) -
Volume: 29
Issue: 4
Pages: pp. 553 - 570
Keywords: CF3I,electron interactions,trifluoroiodomedthane
Research Areas: Electronics & Telecommunications
PDF version: PDF Document Click here to retrieve PDF version of paper (7MB)