| Author(s): |
Loucas G. Christophorou; James K. Olthoff; |
| Title: |
Electron Interactions with CF3I |
| Published: |
January 01, 2000 |
| Abstract: |
Low-energy electron collision data for the plasma processing gas CF3I are sparse. Limited cross section data are available only for total and differential elastic electron scattering, electron-impact ionization, and electron attachment processes. These data are synthesized, assessed, and discussed in this paper. There is a need for further scrutiny of these data and for measurements of the cross sections of the other main electron-collision processes. There is a need also for measurements of the electron transport, ionization, and attachment coefficients of this molecule |
| Citation: |
J. Phys. & Chem. Ref. Data (JPCRD) - |
| Volume: |
29 |
| Issue: |
4 |
| Pages: |
pp. 553 - 570 |
| Keywords: |
;CF3I;electron interactions;trifluoroiodomedthane; |
| Research Areas: |
Electronics & Telecommunications |
| PDF version: |
 Click here to retrieve PDF version of paper (7MB) |
