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Publication Citation: Ion Kinetic-Energy Distributions and Electrical Measurements in AR/O2 rf Glow Discharges

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Author(s): James K. Olthoff; Richard J. Van Brunt; Mark A. Sobolewski;
Title: Ion Kinetic-Energy Distributions and Electrical Measurements in AR/O2 rf Glow Discharges
Published: September 01, 1992
Abstract:
Proceedings: Proc. TenthInternational Conference on Gas Discharges and Their Applications
Pages: pp. 440 - 443
Location: Swansea, UK
Dates: September 13-18, 1992
Research Areas: Electronics & Telecommunications
PDF version: PDF Document Click here to retrieve PDF version of paper (3MB)