Publication Citation
NIST Authors in Bold
 |
| Author(s): | James K. Olthoff; Richard J. Van Brunt; Mark A. Sobolewski; |
|---|---|
| Title: | Ion Kinetic-Energy Distributions and Electrical Measurements in AR/O2 rf Glow Discharges |
| Published: | September 01, 1992 |
| Abstract: | |
| Proceedings: | Proc. TenthInternational Conference on Gas Discharges and Their Applications |
| Pages: | pp. 440 - 443 |
| Location: | Swansea, UK |
| Dates: | September 13-18, 1992 |
| Research Areas: | Electronics & Telecommunications |
| PDF version: |  Click here to retrieve PDF version of paper (2MB) |