Publication Citation
NIST Authors in Bold
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| Author(s): | Amanda N. Goyettes; Yicheng Wang; James K. Olthoff; |
|---|---|
| Title: | Ion Compositions and Energies in Inductively Coupled Plasmas Containing SF6 |
| Published: | July 01, 2001 |
| Abstract: | |
| Citation: | Journal of Vacuum Science and Technology A |
| Volume: | 19 |
| Issue: | 4 |
| Pages: | pp. 1294 - 1297 |
| Research Areas: | Electronics & Telecommunications |
| PDF version: |  Click here to retrieve PDF version of paper (3MB) |