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Publication Citation: Ion Compositions and Energies in Inductively Coupled Plasmas Containing SF6

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Author(s): Amanda N. Goyettes; Yicheng Wang; James K. Olthoff;
Title: Ion Compositions and Energies in Inductively Coupled Plasmas Containing SF6
Published: July 01, 2001
Abstract:
Citation: Journal of Vacuum Science and Technology A
Volume: 19
Issue: 4
Pages: pp. 1294 - 1297
Research Areas: Electronics & Telecommunications
PDF version: PDF Document Click here to retrieve PDF version of paper (3MB)