NIST logo

Publication Citation: Influence of the Substrate Resistivity on the Broadband Characteristics of Silicon Transmission Lines

NIST Authors in Bold

Author(s): Uwe Arz; Hartmut Grabinski; Dylan F. Williams;
Title: Influence of the Substrate Resistivity on the Broadband Characteristics of Silicon Transmission Lines
Published: December 01, 1999
Abstract: This work investigates the broadband propagation characteristics of transmission lines fabricated on silcon substrates of different conductivities.
Proceedings: Tech Dig., Auto. RF Tech. Group Conf.
Pages: pp. 58 - 63
Location: Atlanta, GA
Dates: December 2-3, 1999
Keywords: ;electromagnetic simulation;equivalent-circuit parameters;measurement;silicon substrate effect;transmission line;
Research Areas: Microwave Measurement Services