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Publication Citation: Influence of the Substrate Resistivity on the Broadband Propagation Characteristics of Silicon Transmission Lines

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Author(s): Uwe Arz; Hartmut Grabinski; Dylan F. Williams;
Title: Influence of the Substrate Resistivity on the Broadband Propagation Characteristics of Silicon Transmission Lines
Published: December 01, 1999
Abstract: This work investigates the broadband propagation characteristics of transmission lines fabricated on silicon substrates of different conductivities. We compare calculations to measurements and examine the sensitivity of the frequency-dependent line parameters to substrate conductivity.
Conference: 54th ARFTG Conference Digest
Proceedings: ARFTG Conference Digest-Spring, 54th (Volume: 36)
Volume: 36
Pages: pp. 65 - 70
Location: Atlanta, GA
Dates: December 2-3, 1999
Keywords: electromagnetic simulation,equivalent-circuit parameters,measurement,silicon substrate effect,transmission line
Research Areas: Microwave Measurement Services
DOI: http://dx.doi.org/10.1109/ARFTG.1999.327364  (Note: May link to a non-U.S. Government webpage)
PDF version: PDF Document Click here to retrieve PDF version of paper (94KB)