NIST logo

Publication Citation: Ion Kinetic-Energy Distributions in Argon rf Glow Discharges

NIST Authors in Bold

Author(s): James K. Olthoff; Richard J. Van Brunt; S. B. Radovanov;
Title: Ion Kinetic-Energy Distributions in Argon rf Glow Discharges
Published: November 01, 1992
Abstract:
Citation: Journal of Applied Physics
Volume: 72
Issue: 10
Pages: pp. 4566 - 4574
Research Areas: Electronics & Telecommunications
PDF version: PDF Document Click here to retrieve PDF version of paper (6MB)