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Optical and Mass Spectrometric Investigations of Ions and Neutral Species in SF6 Radio-Frequency Discharges

Published

Author(s)

R Foest, James K. Olthoff, Richard J. Van Brunt, Eric C. Benck, J R. Roberts
Citation
Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
Issue
2

Citation

Foest, R. , Olthoff, J. , Van Brunt, R. , Benck, E. and Roberts, J. (1996), Optical and Mass Spectrometric Investigations of Ions and Neutral Species in SF6 Radio-Frequency Discharges, Physical Review E (Statistical, Nonlinear, and Soft Matter Physics), [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=18850 (Accessed March 28, 2024)
Created July 31, 1996, Updated October 12, 2021