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We have comprehensively reviewed and critically assessed the state of knowledge on electron-interaction cross sections and electron-swarm parameters in SF6. In this paper are presented our: (1) assessed data for the total electron scattering, elastic integral, elastic momentum, total ionization, and dissociative and nondissociative electron attachment cross sections; (2) deduced cross sections for the total vibrational excitation and total dissociation into neutrals; and (3) assessed data for the coefficients of electron-impact ionization, effective ionization, electron attachment, electron drift, and electron diffusion.
Proceedings Title
Proc. XIII International Conference on Gas Discharges and Their Applications
electron interactions, SF<sub>6</sub>, sulfur hexafluoride
Citation
Christophorou, L.
and Olthoff, J.
(2000),
Electron Interactions with SF<sub>6</sub>, Proc. XIII International Conference on Gas Discharges and Their Applications, Glasgow, 1, UK, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=18072
(Accessed October 13, 2025)