Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Electron Interactions With C3F8

Published

Author(s)

Loucas G. Christophorou, James K. Olthoff, MVVS. Rao

Abstract

To aid the many and diverse applications for which perfluoropropane (C3F8) is suited, we critically evaluate and synthesize existing knowledge on electron scattering and electron energy-loss processes for the C3F8 molecule, and provide recommendations for the most reliable data. We also draw attention to electron-interaction data that are not presently available, but are needed for modeling the behavior of C3F8 in practical uses, especially plasma processing.
Citation
J. Phys. & Chem. Ref. Data (JPCRD) -
Volume
25
Issue
5

Keywords

C<sub>3</sub>F<sub>8</sub>, cross sections, electron attachment, electron collisions, electron transport, perfluoropropane, scattering

Citation

Christophorou, L. , Olthoff, J. and Rao, M. (1996), Electron Interactions With C<sub>3</sub>F<sub>8</sub>, J. Phys. & Chem. Ref. Data (JPCRD), National Institute of Standards and Technology, Gaithersburg, MD (Accessed March 28, 2024)
Created September 1, 1996, Updated October 12, 2021