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Publication Citation: Ion Energy Distributions in Inductively Coupled Radio-Frequency Discharges in Argon, Nitrogen, Oxygen, Chlorine, and Their Mixtures

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Author(s): Yicheng Wang; James K. Olthoff;
Title: Ion Energy Distributions in Inductively Coupled Radio-Frequency Discharges in Argon, Nitrogen, Oxygen, Chlorine, and Their Mixtures
Published: May 01, 1999
Abstract: We report ion energy distributions, relative ion intensities, and absolute total ion current densities at the grounded electrode of an inductively-coupled Gaseous Electronics Conference radio-frequency reference cell for discharges generated in pure argon, nitrogen, oxygen and chlorine, and in mixtures of argon with N2, O2, and Cl2. Measured current densities are significantly greater for pure argon and for mixtures containing argon than for pure N2, O2, and Cl2. For all three molecular gases, the ratio of molecular ions to the fragment ions decreases when argon is added to the molecular gas discharges. A possible destruction mechanism for the molecular ions involving metastable argon is discussed.
Citation: Journal of Applied Physics
Issue: 9
Pages: pp. 6358 - 6365
Keywords: ;argon;chlorine;inductively-coupled plasmas;ion energy distributions;nitrogen;oxygen;
Research Areas: Electronics & Telecommunications
PDF version: PDF Document Click here to retrieve PDF version of paper (7MB)