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Publication Citation: Metastable Atom Lithography: A New Technique for Creating Nanostructures

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Author(s): John D. Gillaspy; K K. Berggren; A Bard; J L. Wilbur; Jabez J. McClelland; S L. Rolston; William D. Phillips; M Prentiss; G M. Whitesides;
Title: Metastable Atom Lithography: A New Technique for Creating Nanostructures
Published: January 01, 1996
Abstract:
Citation: IEEE Lasers Electro-Opt Soc Newsletter
Volume: 10
Research Areas: Physics