Publication Citation
NIST Authors in Bold
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| Author(s): | P E. Thompson; C Silvestre; M E. Twigg; G Jernigan; David S. Simons; |
|---|---|
| Title: | The Formation of Abrupt n+ Doping Profiles Using Atomic Hydrogen and Sb During Si MBE |
| Published: | December 01, 1998 |
| Abstract: | |
| Conference: | Proceedings of Materials Research Society Symposium |
| Proceedings: | Materials Research Society Symposium |
| Pages: | pp. 367 - 372 |
| Location: | none, -1 |
| Dates: | February 11, 2009 |
| Research Areas: | Nanotechnology, Chemistry |