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Publication Citation: The Formation of Abrupt n+ Doping Profiles Using Atomic Hydrogen and Sb During Si MBE

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Author(s): P E. Thompson; C Silvestre; M E. Twigg; G Jernigan; David S. Simons;
Title: The Formation of Abrupt n+ Doping Profiles Using Atomic Hydrogen and Sb During Si MBE
Published: December 01, 1998
Abstract:
Conference: Proceedings of Materials Research Society Symposium
Proceedings: Materials Research Society Symposium
Pages: pp. 367 - 372
Location: none, -1
Dates: February 11, 2009
Research Areas: Nanotechnology, Chemistry