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Publication Citation: Preliminary Evaluation of an SF5+ Polyatomic Primary Ion Beam for Analysis of Organic Thin Films by Secondary Ion Mass Spectrometry

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Author(s): John G. Gillen; S V. Roberson;
Title: Preliminary Evaluation of an SF5+ Polyatomic Primary Ion Beam for Analysis of Organic Thin Films by Secondary Ion Mass Spectrometry
Published: December 01, 1998
Abstract:
Citation: Rapid Communications in Mass Spectrometry
Volume: 12
Pages: pp. 1303 - 1312
Research Areas: Nanotechnology, Chemistry