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Publication Citation: The Development of Standard Reference Material 2137 - A Boron Implant in Silicon Standard for Secondary Ion Mass Spectrometry

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Author(s): David S. Simons; P Chi; Robert Gregory Downing; George P. Lamaze;
Title: The Development of Standard Reference Material 2137 - A Boron Implant in Silicon Standard for Secondary Ion Mass Spectrometry
Published: December 01, 1995
Abstract:
Citation: Semiconductor Characterization Present Status and Future Needs
Publisher: AIP Press, Woodbury, NY
Research Areas: Nanotechnology, Chemistry