Publication Citation
NIST Authors in Bold
 |
| Author(s): | David S. Simons; P Chi; Robert G. Downing; George P. Lamaze; |
|---|---|
| Title: | The Development of Standard Reference Material 2137 - A Boron Implant in Silicon Standard for Secondary Ion Mass Spectrometry |
| Published: | December 01, 1995 |
| Abstract: | |
| Citation: | Semiconductor Characterization Present Status and Future Needs |
| Publisher: | AIP Press, Woodbury, NY |
| Research Areas: | Nanotechnology, Chemistry |