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Publication Citation: Microhotplate Chemical Vapor Deposition in the Environmental SEM Chamber

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Author(s): Scott A. Wight; Richard E. Cavicchi; M J. Nystrom; F DiMeo;
Title: Microhotplate Chemical Vapor Deposition in the Environmental SEM Chamber
Published: December 01, 1997
Abstract:
Conference: Microscopy and Microanalysis Proceedings
Proceedings: Microscopy and Microanalysis
Pages: pp. 603 - 604
Location: xxxx, -1
Dates: February 13, 2009
Research Areas: Nanotechnology, Chemistry