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Publication Citation: Effect of Ge on the Segregation of B in Si(100) and Si(110)

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Author(s): P E. Thompson; C Silvestre; G Jernigan; K D. Hobart; David S. Simons; M Gregg;
Title: Effect of Ge on the Segregation of B in Si(100) and Si(110)
Published: December 01, 1997
Abstract:
Citation: Journal of Applied Physics
Volume: 81
Pages: pp. 7317 - 7319
Research Areas: Nanotechnology, Chemistry