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Publication Citation: The Scanning Scattering Microscopy for Surface and Buried Interface Roughness and Defect Imaging

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Author(s): J Lorincik; J Fine; John G. Gillen;
Title: The Scanning Scattering Microscopy for Surface and Buried Interface Roughness and Defect Imaging
Published: December 01, 1997
Abstract:
Conference: Proceedings of the Society of Photo-Optical Instrumentation Engineers
Proceedings: Society of Photo-Optical Instrumentation Engineers
Pages: 3141 pp.
Location: backfill, -1
Dates: February 11, 2009
Research Areas: Nanotechnology, Chemistry