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Publication Citation: Evaluation of Correction Parameters for Elastic-Scattering Effects in Auger-Electron Spectroscopy and X-Ray Photoelectron Spectroscopy

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Author(s): Aleksander Jablonski; C J. Well;
Title: Evaluation of Correction Parameters for Elastic-Scattering Effects in Auger-Electron Spectroscopy and X-Ray Photoelectron Spectroscopy
Published: December 01, 1997
Abstract:
Citation: Journal of Vacuum Science and Technology
Volume: A15
Research Areas: Pressure & Vacuum, Chemical Engineering & Processing, Chemistry, Spectroscopy