NIST logo

Publication Citation: Accurate Flow Measurement in Vacuum Processing

NIST Authors in Bold

Author(s): S A. Tison;
Title: Accurate Flow Measurement in Vacuum Processing
Published: December 01, 1996
Abstract:
Citation: Solid State Technology
Volume: 39
Pages: 73 pp.
Research Areas: Pressure & Vacuum, Flow, Chemical Engineering & Processing, Chemistry