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Publication Citation: Optimizing Residual Gas Analyzers for Process Monitoring

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Author(s): C R. Tilford;
Title: Optimizing Residual Gas Analyzers for Process Monitoring
Published: December 01, 1997
Abstract:
Conference: Proceedings of the Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing
Proceedings: Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing
Pages: 184 pp.
Location: CO
Research Areas: Semiconductor Materials, Chemistry, Materials Science