The Fischione Model 1040 NanoMill is a low-energy, low-angle argon ion milling instrument used for preparing ultra-thin, high-quality transmission electron microscopy (TEM) specimens. The system is used for removing the amorphous damage layer on TEM specimens prepared by focused ion beam (FIB) milling, and for the final thinning of conventionally prepared and FIB prepared TEM specimens. The NanoMill operates at ion energies as low as 50 eV and can produce a beam diameter as small as 1 µm. TEM specimens can be prepared without amorphization, implantation, or redeposition. A secondary electron detector can image the ion-induced secondary electrons that are generated from the targeted area of the specimen.