Our goal is to provide technical leadership in R&D for the MEMS measurement infrastructure essential to improving U.S. economic … more
The Power Devices and Thermal Metrology Project develops electrical and thermal measurement methods and equipment to support development and … more
The CMOS Device and Reliability Project will develop advanced metrology tools to enable high performance CMOS (Complementary Metal Oxide … more
The Back-End-of-Line (BEOL) Reliability Metrology Development project aims to develop the metrology to enable quantitative and mechanistic … more
The Nanoelectronic Device Metrology (NEDM) project is developing the measurement science infrastructure that will enable emerging … more
The Thin Film Electronics Project enables the commercialization of emerging and future semiconductor electronic device technologies, such as … more
A JEOL model 7830F field emission source, scanning Auger microscope. more
NIST ‘Hybrid Metrology’ Method Could Improve Computer Chips
NIST Reveals Switching Mechanism in Promising Computer Memory Device
Novel Temperature Calibration Improves NIST Microhotplate Technology
Neutron Researchers Discover Widely Sought Property in Magnetic Semiconductor
Thermo-Mechanical Characterization of Au–In Transient Liquid Phase Bonding Die-Attach
2012 Updates to the International Technology Roadmap for Semiconductors (ITRS) Metrology Chapter
EVALUATING METHODS OF SHIPPING THIN SILICON WAFERS FOR 3D STACKED APPLICATIONS
General Information: 301-975-NIST (6478) inquiries@nist.gov
100 Bureau Drive, Stop 1070 Gaithersburg, MD 20899-1070
