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Semiconductors Portal

Programs and Projects
Back-End-of-Line Reliability Metrology Development

The Back-End-of-Line (BEOL) Reliability Metrology Development project aims to develop the metrology to enable quantitative and mechanistic … more

Power Device and Thermal Metrology

The Power Devices and Thermal Metrology Project develops electrical and thermal measurement methods and equipment to support development and … more

MEMS Measurement Science and Standards

Our goal is to provide technical leadership in R&D for the MEMS measurement infrastructure essential to improving U.S. economic … more

Analytical Transmission Scanning Electron Microscopy

This project develops low-energy transmission electron diffraction, imaging, and spectroscopy in the scanning electron microscope, to enable … more

COMPLETED: Dimensional Metrology for Nanoscale Patterns

Our goal is to develop and demonstrate precise measurement methods that quantify the physical shape, critical dimensions (CD) and the structure of … more

Nanostructure Fabrication and Metrology

Single photons are the fundamental particles for all optical measurements. Single photon detectors made from avalanche photodiodes or … more

Instruments
Scanning Auger Microprobe

A JEOL model 7830F field emission source, scanning Auger microscope. more

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Contact

General Information:
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inquiries@nist.gov

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