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Topic Area: Manufacturing
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Displaying records 951 to 960 of 1000 records.
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951. NIST Microform Calibration - How Does It Benefit U.S. Industry?
Topic: Manufacturing
Published: 10/1/1998
Authors: Jun-Feng Song, Theodore Vincent Vorburger
Abstract: In microform metrology, complex 3-D surface features in the micrometer range must be quantified for their space and size including dimensions, curves, angles, profile deviations, and alignment errors, as well as surface roughness with measurement unc ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823109

952. NIST Virtual/Physical Random Profile Roughness Calibration Standards
Topic: Manufacturing
Published: 10/1/1998
Authors: Jun-Feng Song, Christopher J. Evans, Michael L McGlauflin, Eric Paul Whitenton, Theodore Vincent Vorburger, Y B Yuan
Abstract: The NIST (National Institute of Standards and Technology) virtual/physical surface roughness calibration standard consists of physical specimens whose surfaces are manufactured by a numerically controlled diamond-turning process using digitized profi ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820910

953. National Institute of Standards and Technology - Texas Instruments Industrial Collaboratory Testbed
Topic: Manufacturing
Published: 10/1/1998
Authors: Michael T Postek, Marylyn H. Bennett, N J Zaluzec, Thomas E Wheatley, Samuel N Jones
Abstract: A portion of the mission of the NIST Manufacturing Engineering Laboratory (MEL) is to improve and advance length metrology in aid of U.S. Industry. This responsibility is found within the Precision Engineering Division (PED). The successful developme ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=821791

954. Accuracy Differences Among Photomask Metrology Tools--and Why They Matter
Topic: Manufacturing
Published: 9/1/1998
Author: James Edward Potzick
Abstract: A variety of different kinds of photomask critical dimension (CD) metrology tools are available today to help meet current and future metrology challenges. These tools are based on different operating principles, and have differing cost, throughput, ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823105

955. Case Against Optical Gauge Block Metrology
Topic: Manufacturing
Published: 9/1/1998
Authors: Theodore D Doiron, Dennis S Everett, Bryon S. Faust, Eric S Stanfield, John Richard Stoup
Abstract: The current definition of length of a gage block is a very clever attempt to evade the systematic errors associated with the wringing layer thickness and optical phase corrections. In practice, there are very large systematic operator and surface eff ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820890

956. Minimizing Error Sources in Gage Block Mechanical Comparison Measurements
Topic: Manufacturing
Published: 9/1/1998
Authors: Bryon S. Faust, John Richard Stoup, Debra K Stanfield
Abstract: Error sources in gage block mechanical comparisons can range from classical textbook examples (thermal gradients, correct temperature value, and correct master value) to a completely counter-intuitive example of diamond probe tip wear at low applied ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820895

957. Minimizing Errors in Phase Change Correction Measurements for Gage Blocks Using a Spherical Contact Techniques
Topic: Manufacturing
Published: 9/1/1998
Authors: John Richard Stoup, Bryon S. Faust, Theodore D Doiron
Abstract: One of the most elusive measurement elements in gage block interferometry is the correction for the phase change on reflection. Techniques used to quantify this correction have improved over the years, but the measurement uncertainty has remained rel ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820914

958. Patterning on Passivated Semiconductor Surfaces
Topic: Manufacturing
Published: 8/7/1998
Authors: John A Dagata, E Snow
Abstract: Abstract unavailable.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820734

959. NIST Calibration Services for Gas Flow Meters: Piston Prover and Bell Prover Gas Flow Facilities
Series: Special Publication (NIST SP)
Report Number: 250-49
Topic: Manufacturing
Published: 8/1/1998
Authors: John D Wright, G E. Mattingly
Abstract: This document provides a description of the small and medium range gas flow calibration facilities at the National Institute of Standards and Technology (NIST), Fluid Flow Group, as reported in NIST Special Publication 250 for Test Nos. 18010C-18040C ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830588

960. Accuracy and Traceability in Dimensional Measurements
Topic: Manufacturing
Published: 6/1/1998
Author: James Edward Potzick
Abstract: Dimensional measurements of importance to microlithography include feature sizes and feature placement on photomasks and wafers, overlay eccentricities, defect and particle sizes on masks and wafers, and many others. A common element is that the obje ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820907



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Looking for a NIST Special Publication (NIST SP Series)? Place the series number and dash in the report number field (Example: 800-) and begin your search.

  • SP 250-XX: Calibration Services
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