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Topic Area: Manufacturing
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Displaying records 951 to 960 of 1000 records.
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951. Improving Pitch and Step Height Measurements Using the Calibrated Atomic Force Microscope
Topic: Manufacturing
Published: 11/1/1998
Authors: R Koning, Ronald G Dixson, Joseph Fu, V W. Tsai
Abstract: No abstract.

952. A Simple Technique for Observing Fringe Interpolation Errors in Michelson Interferometers
Topic: Manufacturing
Published: 10/1/1998
Authors: Jack A Stone Jr, Lowell P. Howard
Abstract: We describe a simple, convenient method for measuring nonlinearities in displacement-measuring Michelson interferometers. Nonlinearities with a spatial periodicity of one optical fringe are a well-known source of error in precision interferometry. Ou ...

953. Application of Laser Feedback Metrology to a Hexapod Test Strut
Topic: Manufacturing
Published: 10/1/1998
Authors: M Schmidt-Lange, E Amatucci, Albert J. Wavering
Abstract: A laser position feedback system has been designed to improve the accuracy of strut positioning for the prototype Ingersoll2 Octahedral Hexapod machine installed at National Institute of Standards and Technology (NIST) (Figure 1). Strut laser fee ...

954. NIST Microform Calibration - How Does It Benefit U.S. Industry?
Topic: Manufacturing
Published: 10/1/1998
Authors: Jun-Feng Song, Theodore Vincent Vorburger
Abstract: In microform metrology, complex 3-D surface features in the micrometer range must be quantified for their space and size including dimensions, curves, angles, profile deviations, and alignment errors, as well as surface roughness with measurement unc ...

955. NIST Virtual/Physical Random Profile Roughness Calibration Standards
Topic: Manufacturing
Published: 10/1/1998
Authors: Jun-Feng Song, Christopher J. Evans, Michael L McGlauflin, Eric Paul Whitenton, Theodore Vincent Vorburger, Y B Yuan
Abstract: The NIST (National Institute of Standards and Technology) virtual/physical surface roughness calibration standard consists of physical specimens whose surfaces are manufactured by a numerically controlled diamond-turning process using digitized profi ...

956. National Institute of Standards and Technology - Texas Instruments Industrial Collaboratory Testbed
Topic: Manufacturing
Published: 10/1/1998
Authors: Michael T Postek, Marylyn H. Bennett, N J Zaluzec, Thomas E Wheatley, Samuel N Jones
Abstract: A portion of the mission of the NIST Manufacturing Engineering Laboratory (MEL) is to improve and advance length metrology in aid of U.S. Industry. This responsibility is found within the Precision Engineering Division (PED). The successful developme ...

957. Accuracy Differences Among Photomask Metrology Tools--and Why They Matter
Topic: Manufacturing
Published: 9/1/1998
Author: James Edward Potzick
Abstract: A variety of different kinds of photomask critical dimension (CD) metrology tools are available today to help meet current and future metrology challenges. These tools are based on different operating principles, and have differing cost, throughput, ...

958. Case Against Optical Gauge Block Metrology
Topic: Manufacturing
Published: 9/1/1998
Authors: Theodore D Doiron, Dennis S Everett, Bryon S. Faust, Eric S Stanfield, John Richard Stoup
Abstract: The current definition of length of a gage block is a very clever attempt to evade the systematic errors associated with the wringing layer thickness and optical phase corrections. In practice, there are very large systematic operator and surface eff ...

959. Minimizing Error Sources in Gage Block Mechanical Comparison Measurements
Topic: Manufacturing
Published: 9/1/1998
Authors: Bryon S. Faust, John Richard Stoup, Debra K Stanfield
Abstract: Error sources in gage block mechanical comparisons can range from classical textbook examples (thermal gradients, correct temperature value, and correct master value) to a completely counter-intuitive example of diamond probe tip wear at low applied ...

960. Minimizing Errors in Phase Change Correction Measurements for Gage Blocks Using a Spherical Contact Techniques
Topic: Manufacturing
Published: 9/1/1998
Authors: John Richard Stoup, Bryon S. Faust, Theodore D Doiron
Abstract: One of the most elusive measurement elements in gage block interferometry is the correction for the phase change on reflection. Techniques used to quantify this correction have improved over the years, but the measurement uncertainty has remained rel ...

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