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931. The Scanning Electron Microscope
Topic: Manufacturing
Published: 1/1/1997
Author: Michael T Postek
Abstract: The scanning electron microscope (SEM) is an important research and production tool extensively used in many phases of industry throughout the world. The popularity of the instrument results from the need to inspect and obtain information about sampl ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820862

932. Thermal Expansion of Long Slender Rods With Forced Convection Cooling Along the Rod Length
Series: NIST Interagency/Internal Report (NISTIR)
Report Number: 5975
Topic: Manufacturing
Published: 1/1/1997
Author: F Rudder
Abstract: This report presents explicit analytical expressions for the thermal expansion of a rod with heat input at one end and forced convection cooling along the length of the rod. When the rod is graduated for length measurement (i.e., a ruler or ball scre ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820871

933. Tip and Surface Reconstruction in Scanned Probe Microscopy
Topic: Manufacturing
Published: 1/1/1997
Author: John S Villarrubia
Abstract: The non-vanishing size of tips in scanned probe microscopes (e.g., atomic force microscope or scanning tunneling microscope) results in imaging errors. Correction of these errors requires estimation of the tip shape (tip reconstruction) followed by e ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820881

934. Workshop Discussion: A Framework for Standards Development and the Future of the IASPM Workshops
Topic: Manufacturing
Published: 1/1/1997
Author: John A Dagata
Abstract: A proposal to develop the Industrial Applications of Scanned Probe Microscopy (IASPM) workshops, which NIST has co-sponsored with Sematech, the ASTM E42.14 subcommittee, and the American Vacuum Society, over the past four years into a forum for assis ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820836

935. Is Your Scanning Electron Microscope Hi-Fi?
Topic: Manufacturing
Published: 12/7/1996
Authors: Andras Vladar, Michael T Postek, S Davilla
Abstract: The scanning electron microscope (SEM) historically has been used mainly as an image-producing device and, in spite of certain obvious and sometimes serious electronics problems, serves in this function as an acceptable and effective instrument for m ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820784

936. The Development of an Industrial Standard (Standard Reference Material) SRM 2090
Topic: Manufacturing
Published: 11/22/1996
Author: Michael T Postek
Abstract: This management report documents, as a case study, the development of a new industrial standard, SRM 2090, from the view point of the technologist. This report can be viewed as a generic template for the development of a state-of-the-art NIST standar ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820860

937. Error Compensation for CMM Touch Trigger Probes
Topic: Manufacturing
Published: 10/1/1996
Authors: William Tyler Estler, Steven David Phillips, Bruce R. Borchardt, Ted Hopp, G Witzgall, M Levenson, K Eberhardt, Marjorie A McClain, Y Shen, X Zhang
Abstract: We present the analysis of a simple mechanical model of a common type of kinematic seat touch trigger probe widely used on modern coordinate measuring machines (CMMs). The model provides a quantitative description of the pretravel variation or probe- ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822130

938. Stylus-Laser Surface Calibration System
Topic: Manufacturing
Published: 10/1/1996
Authors: Theodore Vincent Vorburger, Jun-Feng Song, T Giauque, Thomas B Renegar, Eric Paul Whitenton, M Croarkin
Abstract: A stylus-laser surface calibration system was developed to calibrate the NIST sinusoidal roughness Standard Reference Materials (SRM) 2071-2075. Step height standards are used to calibrate the stylus instrument in the vertical direction, and a laser ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820830

939. Corrections for Wavelength Variations in Precision Interferometric Displacement Measurements
Topic: Manufacturing
Published: 9/1/1996
Authors: Jack A Stone Jr., Steven David Phillips, G Mandolfo
Abstract: Precision interferometric displacement measurements require deadpath corrections to account for variations in wavelength during the course of the measurement. This paper discusses common errors in applying deadpath corrections and describes the corre ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820824

940. New Certified Length Scale for Microfabrication Metrology
Topic: Manufacturing
Published: 9/1/1996
Author: James Edward Potzick
Abstract: The National Institute of Standards and Technology is developing a dimensional pitch standard covering the range 1 micrometers to 10 mm, intended for the calibration of microscope magnification and of dimensional metrology instrument scales. Called S ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820811



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