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991. Improving Step Height and Pitch Measurements Using the Calibrated Atomic Force Microscope
Topic: Manufacturing
Published: 1/1/1998
Authors: R Koning, Ronald G Dixson, Joseph Fu, V W. Tsai, Theodore Vincent Vorburger
Abstract: The most important industrial application of Atomic Force Microscopy (AFM) is probably the accurate measurement of geometrical dimensions of small surface structures. In order to maintain the instrument''s performance and to achieve the high accuracy ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820898

992. Learning to Set Up Numerical Optimizations of Engineering Designs
Topic: Manufacturing
Published: 1/1/1998
Authors: Mark Schwabacher, T Ellman, H Hirsh
Abstract: Gradient-based numerical optimization of complex engineering designs offers the promise of rapidly producing better designs. However, such methods generally assume that the objective function and constraint functions are continuous, smooth, and defin ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822344

993. Measurement Traceability of NIST Standard Rockwell Diamond Indenters
Topic: Manufacturing
Published: 1/1/1998
Authors: Jun-Feng Song, Samuel Rea Low III, Walter S Liggett Jr, David J Pitchure, Theodore Vincent Vorburger
Abstract: A metrology-based Rockwell hardness scale is established by a standard machine and a standard diamond indenter. Both must be established through force and dimensional metrology with acceptably small measurement uncertainties. In 1994, NIST develope ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823113

994. Measurements of Pitch, Height, and Width Artifacts with the NIST Calibrated Atomic Force Microscope
Topic: Manufacturing
Published: 1/1/1998
Authors: Ronald G Dixson, V W. Tsai, Theodore Vincent Vorburger, Edwin Ross Williams, X Wang, Joseph Fu, R Koning
Abstract: The presence of the atomic force microscope (AFM) in the industrial metrology setting is rapidly increasing. Properties commonly measured in such applications are: feature spacing (pitch), feature height (or depth), feature width (critical dimension) ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820838

995. NIST Microform Calibration - How It Benefits U.S. Industry
Topic: Manufacturing
Published: 1/1/1998
Authors: Jun-Feng Song, Theodore Vincent Vorburger
Abstract: In microform metrology, complex 3-D surface features in the micrometer range must be quantified for their space and size including dimensions, curves, angles, profile deviations, and alignment errors, as well as surface roughness with measure uncerta ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820912

996. Performing Measurements of Surface Structures With the Calibrated Atomic Force Microscope
Topic: Manufacturing
Published: 1/1/1998
Authors: R Koning, Ronald G Dixson, Joseph Fu, V W. Tsai, Theodore Vincent Vorburger
Abstract: The use of the atomic force microscope (AFM) to characterize surface structures for industrial applications is rapidly increasing.  To compare the results obtained by different instruments and to achieve high accuracy, the scales of an AFM must ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823087

997. Pixel Based Absolute Topography Test for Three Flats
Topic: Manufacturing
Published: 1/1/1998
Authors: R E. Parks, Lianzhen Shao, Christopher J. Evans
Abstract: We demonstrate a new method of performing the absolute three flat test using reflection symmetries of the surfaces and an algorithm for generating the rotation of arrays of pixel data. Most of the operations involve left/right and top/bottom flips of ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820902

998. Rapidly Renewable Lap: Theory and Practice
Topic: Manufacturing
Published: 1/1/1998
Authors: Christopher J. Evans, R E. Parks, David J Roderick, Michael L McGlauflin
Abstract: The rapidly renewable lap (RRL) uses a textured substrate over which thin films are slumped. The substrate provides the geometry of the lap and a localized texture, depending on the film thickness, properties, and means by which it is deformed over a ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820893

999. Reactive Scheduling System Implementations Using a Simulated Shop Floor
Topic: Manufacturing
Published: 1/1/1998
Author: Frank H Riddick
Abstract: Developing approaches to integrating manufacturing applications is important for increasing manufacturing productivity. A reactive scheduling system architecture has been developed that defines how to integrate scheduling technology with manufacturin ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=821463

1000. Scanning Electron Microscope Length Standards (Chapter VII in: Benchmarking the Length Measurement Capabilities of the National Institute of Standards and Technology, R.M. Silver, J.L. Land, Editors, NISTIR 6036)
Series: NIST Interagency/Internal Report (NISTIR)
Report Number: 6036
Topic: Manufacturing
Published: 1/1/1998
Authors: Michael T Postek, Joseph Fu
Abstract: A cross-section of length measurement capabilities fiom the Precision Engineering Division within the National Institute of Standards and Technology is benchmarked against those of other leading National Measurement Institutes. We present a variety ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820863



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