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Topic Area: Manufacturing

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971. Influence of Data Analysis and Other Factors on the Short-term Stability of Vertical Scanning-Probe Microscope Calibration Measurements
Topic: Manufacturing
Published: 3/1/1998
Authors: H Edwards, J Jorgensen, John A Dagata, Y Strausser, J Schneir
Abstract: We report a study of a fundamental limit to the accuracy of vertical measurements made using scanning-probe microscopes (SPM): the short-term stability of a vertical calibration using a waffle-pattern artifact. To test the instrumental component of t ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820998

972. Round Robin Determination of Power Spectral Densities of Different Si Wafer Surfaces
Topic: Manufacturing
Published: 3/1/1998
Authors: Egon Marx, I J Malik, Y Strausser, T Bristow, N Poduje, J C Stover
Abstract: Power spectral densities (PSDs) were used to characterize a set of surfaces over a wide range of lateral as well as perpendicular dimensions. Twelve 200-mm-diameter Si wafers were prepared and the surface finishes ranged from as-ground wafers to epit ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820901

973. Tip Characterization for Scanned Probe Microscope Width Metrology
Topic: Manufacturing
Published: 3/1/1998
Authors: Samuel Dongmo, John S Villarrubia, Samuel N Jones, Thomas B Renegar, Michael T Postek, Jun-Feng Song
Abstract: Determination of the tip shape is an important prerequisite for converting the various scanning probe microscopies form imaging tools into dimensional metrology tools with sufficient accuracy to meet the critical dimension measurement requirements of ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823092

974. Uncertainty Analysis for Angle Calibrations Using Circle Closure
Series: Journal of Research (NIST JRES)
Topic: Manufacturing
Published: 3/1/1998
Author: William Tyler Estler
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823098

975. Uncertainty Analysis for Angle Calibrations Using Circle Closure
Topic: Manufacturing
Published: 3/1/1998
Author: William Tyler Estler
Abstract: We analyze two types of full-circle angle calibrations: a simple closure in which a single set of unknown angular segments is sequentially compared with an unknown reference angle, and a dual closure in which two divided circles are simultaneously ca ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820892

976. Growth and Analysis of Near Ideal Thin Films and Multilayers
Topic: Manufacturing
Published: 2/18/1998
Authors: J Pedulla, R Deslattes, S Owens
Abstract: As thin film technology moves into the truly nano-scale region [<10 nm], many conventional methods of growth and analysis of thin films and multilayers break down due to large levels of interfacial roughness and diffusion, or incompatibility of the a ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822528

977. Performing Measurement of Surface Structures With the Calibrated Atomic Force Microscope
Topic: Manufacturing
Published: 2/1/1998
Author: R Koning
Abstract: The use of the atomic force microscope (AFM) to characterize surface structures for industrial applications is rapidly increasing. To compare the results obtained by different instruments and to achieve high accuracy, the scales of an AFM must be cal ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820897

978. Metal-based Room-temperature Operating Single Electron Devices Using Scanning Probe Oxidation
Topic: Manufacturing
Published: 1/30/1998
Authors: K Matsumoto, Y Gotoh, T Maeda, John A Dagata, J S Harris
Abstract: Coulomb oscillation was clearly observed at room temperature in the single electron transistor fabricated by atomic force microscopy (AFM) nano-oxidation process. In order to obtain a clear Coulomb oscillation at room temperature, new and improved fa ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=821784

979. Advances in NIST Standard Rockwell Diamond Indenters
Topic: Manufacturing
Published: 1/1/1998
Authors: Jun-Feng Song, Samuel Rea Low III, David J Pitchure, Theodore Vincent Vorburger
Abstract: Recent developments in standard hardness machines and microform calibration techniques have made it possible to establish a worldwide unified Rockwell hardness scale with metrological traceability. This includes the establishments of the reference st ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820911

980. An Integrated Approach to Optimal Three Dimensional Layout and Routing
Topic: Manufacturing
Published: 1/1/1998
Authors: Simon Szykman, J Cagan, P Weisser
Abstract: This paper describes the combination of previously-developed component placement and routing algorithms into an integrated computational approach to product layout optimization. Previous work introduced simulated annealing-based algorithms for opt ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=821540



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