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911. NORAMET Comparison of Gauge Block Measurement by Optical Interferometry
Topic: Manufacturing
Published: 10/1/1999
Authors: Jennifer Decker, A Lapointe, John Richard Stoup, M V Alonso, J R Pekelsky
Abstract: A varied assortment of 47 new and used steel, ceramic, chromium carbide and tungsten carbide gauge blocks from 9 manufacturers, ranging in length from 05. mm to 101.6  mm were calibrated by four laboratories from the NORAMET countries using the ...

912. Summaries of the Programs of the Manufacturing Engineering Laboratory 1999
Series: NIST Interagency/Internal Report (NISTIR)
Report Number: 6369
Topic: Manufacturing
Published: 8/2/1999
Authors: Lisa Jean Fronczek, Bessmarie A. Young
Abstract: The National Institute of Standards and Technology's Manufacturing Engineering Laboratory (MEL) works with the U.S. manufacturing industry to develop and apply infrastructural technology, measurements, and standards to meet their needs. This report c ...

913. Measurement as Inference: Fundamental Ideas
Topic: Manufacturing
Published: 8/1/1999
Author: William Tyler Estler
Abstract: We review the logical basis of inference as distinct from deduction, and show that measurements in general, and dimensional metrology in particular, are best viewed as exercises in probable inference: reasoning from incomplete information. The resul ...

914. The NIST Length Scale Interferometer
Series: Journal of Research (NIST JRES)
Topic: Manufacturing
Published: 7/23/1999
Authors: John S Beers, William B. Penzes
Abstract: The National Institute of Standards and Technology (NIST) interferometer for measuring graduated length scales has been in use since 1965. It was developed in response to the redefinition of the meter in 1960 from the prototype platinum-iridium bar t ...

915. Effects of Defocus and Algorithm on Optical Step Height Calibration
Topic: Manufacturing
Published: 7/1/1999
Authors: Theodore D Doiron, Theodore Vincent Vorburger, P Sullivan
Abstract: Defocus effects on step height measurements by interferometric microscopy are estimated using different algorithms to calculate the step height. The interferometric microscope is a Mirau-type with a 20x objective and a numerical aperture (NA) of 0.4. ...

916. Extensions of the Single-Integral-Equation Method
Topic: Manufacturing
Published: 7/1/1999
Author: Egon Marx
Abstract: Scattering of electromagnetic waves by homogeneous dielectric or finitely conducting bodies can be reduced to the solution of integral equations. In the simpler cases, only a single-integral-equation is needed, with no increase of required memory ove ...

917. Image Sharpness Measurement in Scanning Electron Microscope - Part III
Topic: Manufacturing
Published: 7/1/1999
Authors: Samuel N Jones, Robert D. Larrabee, Michael T Postek, Andras Vladar, Nien F Zhang
Abstract: Fully automated or semi-automated scanning electron microscopes (SEM) are now commonly used in semiconductor production and other forms of manufacturing. Testing and proving that the instrument is performing at a satisfactory level of sharpness is an ...

918. Rockwell Hardness - A Method-Dependent Standards Reference Material
Topic: Manufacturing
Published: 7/1/1999
Authors: Samuel Rea Low III, R Gettings, Walter S Liggett Jr, Jun-Feng Song
Abstract: Rockwell hardness is a method-dependent measurement of the deformation of a material in response to an applied force. It is not a fundamental physical property of a material. There are no alternative measurement systems to directly or independently m ...

919. Voltage Modulation Scanned Probe Oxidation
Topic: Manufacturing
Published: 7/1/1999
Authors: F Perez-murano, K Birkelund, K Morimoto, John A Dagata
Abstract: Scanned probe microscope (SPM) oxidation with voltage modulation leads to a significant enhancement of the oxide growth rate, improvement of the aspect ratio of oxide features, and control of the structural and electrical properties of the SPM oxide. ...

920. Assessment Error Sources in Rockwell Hardness Measurements
Topic: Manufacturing
Published: 6/1/1999
Authors: Walter S Liggett Jr, Samuel Rea Low III, David J Pitchure, Jun-Feng Song
Abstract: In the use of hardness test blocks, the uncertainty due to block non-uniformity can be reduced if one is willing to make measurements at specified locations on the blocks. Statistical methods for achieving this reduction are explained in this paper. ...

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