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911. Workshop Discussion: A Framework for Standards Development and the Future of the IASPM Workshops
Topic: Manufacturing
Published: 1/1/1997
Author: John A Dagata
Abstract: A proposal to develop the Industrial Applications of Scanned Probe Microscopy (IASPM) workshops, which NIST has co-sponsored with Sematech, the ASTM E42.14 subcommittee, and the American Vacuum Society, over the past four years into a forum for assis ...

912. Is Your Scanning Electron Microscope Hi-Fi?
Topic: Manufacturing
Published: 12/7/1996
Authors: Andras Vladar, Michael T Postek, S Davilla
Abstract: The scanning electron microscope (SEM) historically has been used mainly as an image-producing device and, in spite of certain obvious and sometimes serious electronics problems, serves in this function as an acceptable and effective instrument for m ...

913. The Development of an Industrial Standard (Standard Reference Material) SRM 2090
Topic: Manufacturing
Published: 11/22/1996
Author: Michael T Postek
Abstract: This management report documents, as a case study, the development of a new industrial standard, SRM 2090, from the view point of the technologist. This report can be viewed as a generic template for the development of a state-of-the-art NIST standar ...

914. Error Compensation for CMM Touch Trigger Probes
Topic: Manufacturing
Published: 10/1/1996
Authors: William Tyler Estler, Steven David Phillips, Bruce R. Borchardt, Ted Hopp, G Witzgall, M Levenson, K Eberhardt, Marjorie A McClain, Y Shen, X Zhang
Abstract: We present the analysis of a simple mechanical model of a common type of kinematic seat touch trigger probe widely used on modern coordinate measuring machines (CMMs). The model provides a quantitative description of the pretravel variation or probe- ...

915. Stylus-Laser Surface Calibration System
Topic: Manufacturing
Published: 10/1/1996
Authors: Theodore Vincent Vorburger, Jun-Feng Song, T Giauque, Thomas B Renegar, Eric Paul Whitenton, M Croarkin
Abstract: A stylus-laser surface calibration system was developed to calibrate the NIST sinusoidal roughness Standard Reference Materials (SRM) 2071-2075. Step height standards are used to calibrate the stylus instrument in the vertical direction, and a laser ...

916. Corrections for Wavelength Variations in Precision Interferometric Displacement Measurements
Topic: Manufacturing
Published: 9/1/1996
Authors: Jack A Stone Jr., Steven David Phillips, G Mandolfo
Abstract: Precision interferometric displacement measurements require deadpath corrections to account for variations in wavelength during the course of the measurement. This paper discusses common errors in applying deadpath corrections and describes the corre ...

917. New Certified Length Scale for Microfabrication Metrology
Topic: Manufacturing
Published: 9/1/1996
Author: James Edward Potzick
Abstract: The National Institute of Standards and Technology is developing a dimensional pitch standard covering the range 1 micrometers to 10 mm, intended for the calibration of microscope magnification and of dimensional metrology instrument scales. Called S ...

918. Stitching of Equatorial Profiles for Extended Spatial Range Assessment
Topic: Manufacturing
Published: 8/1/1996
Authors: P Sullivan, R E. Parks, Lianzhen Shao
Abstract: This paper describes a method for stitching multiple overlapping interferometric measurements of the equator of a high quality sphere to produce a single profile representing the roundness of the ball. The resulting optical profile measurement is com ...

919. An Approach to the Reduction of Hydrocarbon Contamination in the Scanning Electron Microscope
Topic: Manufacturing
Published: 6/1/1996
Author: Michael T Postek
Abstract: The deposition of electron bean-induced specimen contamination in both the transmission (TEM) and scanning electron microscopes (SEM) has remained a problem since the beginning of these forms of microscopy. Generally, sources of SEM contamination can ...

920. Modeling Spatial Reasoning Systems With Shape Algebras and Formal Logic
Topic: Manufacturing
Published: 6/1/1996
Author: Scott Chase
Abstract: The combination of the paradigms of shape algebras and predicate logic representations,used in a new method for describing designs, is presented. First order predicate logicprovides a natural, intuitive way of representing shapes and spatial relation ...

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