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911. Finish and Figure Metrology for Soft X­ray Optics
Topic: Manufacturing
Published: 1/1/1997
Authors: Theodore Vincent Vorburger, Christopher J. Evans, V W. Tsai, Joseph Fu, E. C. Williams, Ronald G Dixson, P Sullivan, T. McWaid
Abstract: Abstract not available.

912. Hybrid Optical-Electrical Overlay Test Structure
Topic: Manufacturing
Published: 1/1/1997
Authors: Michael W. Cresswell, Robert Allen, L Linholm, William F Guthrie, William B. Penzes, A Gurnell
Abstract: This paper describes the exploratory use of electrical test structures to enable the calibration of optical overlay instruments of the type used to monitor semiconductor-device fabrication processes. Such optical instruments are known to be vulnerabl ...

913. Industrial Uses of STM and AFM
Topic: Manufacturing
Published: 1/1/1997
Authors: Theodore Vincent Vorburger, John A Dagata, G. Wilkening, K Iizuka
Abstract: We review the field of STM and AFM as applied to industrial problems, and we classify the applications into four classes: research with potential benefit to industry, research performed by industry, applications off-line in manufacturing, and applica ...

914. Integral Equations for Scattering by a Particle in a Layer
Topic: Manufacturing
Published: 1/1/1997
Author: Egon Marx
Abstract: The single integral equation method is applied to the scattering of electromagnetic waves by particles in a layer on top of a substrate. A second layer on top of the first one can have indentations.

915. Measurement Comparison of Stylus Radii
Topic: Manufacturing
Published: 1/1/1997
Authors: Jun-Feng Song, Theodore Vincent Vorburger
Abstract: Three methods were used for measuring the radii of the same stylus of our stylus instrument. The measurement results were compared and showed good agreement. Using razor blade tracing, the stylus radius was measured as r=1.60um with an expanded uncer ...

916. New NIST-Certified Small Scale Pitch Standard
Topic: Manufacturing
Published: 1/1/1997
Author: James Edward Potzick
Abstract: The National Institute of Standards and Technology is developing a dimensional pitch standard covering the range 1 ?m to 10 mm, intended for the calibration of microscope magnification and dimensional metrology instrument scales. While NIST has long ...

917. On Chip Morphology, Tool Wear and Cutting Mechanics in Finish Hard Turning
Topic: Manufacturing
Published: 1/1/1997
Authors: Matthew A. Davies, Y K Chou, Christopher J. Evans
Abstract: Topography of surfaces produced in finish hard turning using cubic boron nitride (CBN) tools is affected by a large number of factors including tool wear and the mechanics of the chip formation process. This paper shows first that tool wear rates are ...

918. On the Dynamics of Chip Formation in Machining Hard Metals
Topic: Manufacturing
Published: 1/1/1997
Authors: Matthew A. Davies, Timothy J Burns, Christopher J. Evans
Abstract: The results of orthogonal cutting tests on electroplated Nickel-Phosphorus (15% phosphorus) and AISI 52100 bearing steel are presented and compared. For both materials, chips become segmented at relatively low cutting speeds (0.3 m/s to 2 m/s) due to ...

919. Pitch and Step Height Measurements Using NIST
Topic: Manufacturing
Published: 1/1/1997
Authors: R Koning, Ronald G Dixson, Joseph Fu, V W. Tsai, Theodore Vincent Vorburger, Edwin Ross Williams, X Wang
Abstract: The use of the atomic force microscope (AFM) for step height and pitch measurements in industrial applications is rapidly increasing. To compare the results obtained by different instruments and to achieve high accuracy, the scales of an AFM must be ...

920. Report of External Review of NIST NAMT Project on Nanomanufacturing of Atom-Based Dimensional Standards
Series: NIST Interagency/Internal Report (NISTIR)
Report Number: 6023
Topic: Manufacturing
Published: 1/1/1997
Authors: J Land, Dennis A Swyt
Abstract: This report summarizes a workshop held on August 15, 1996, which provided an opportunity to U.S. industry in distributed and virtual manufacturing technologies to review and provide a critique of the Nanomanufacturing of Atom-Based Dimensional Standa ...

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