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Topic Area: Manufacturing

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Displaying records 901 to 910 of 1000 records.
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901. Self-Calibration and Error Compensation Using Reference Position Markers
Topic: Manufacturing
Published: 1/1/1999
Author: H Zou
Abstract: In this paper, reference position markers are proposed for self-calibration and error compensation. Self-calibration of x-y motion guides is discussed with a focus on the orthogonality calibration. An algorithm is developed using a closure method and ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820956

902. Sources of Error in Absolute Distance Interferometry
Topic: Manufacturing
Published: 1/1/1999
Authors: Jack A Stone Jr, Alois Stejskal, Lowell P. Howard
Abstract: In this paper we describe the status of our research on the use of diode lasers for absolute distance interferometry, and we discuss the major sources of uncertainty that limit the accuracy of this technique for distance measurement. We have primaril ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820951

903. Telepresence:  A New Paradigm for Solving Contamination Problems
Topic: Manufacturing
Published: 1/1/1999
Authors: Michael T Postek, Marylyn H. Bennett, N J Zaluzec
Abstract: When a contamination event occurs in a semiconductor fab, a process engineer must act quickly to find the cause. It is cost-prohibitive to maintain a full complement of analytical tools in a fab that would be necessary to identify very small particle ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823117

904. Telepresence: A New Paradigm for Solving Contamination Problems
Topic: Manufacturing
Published: 1/1/1999
Authors: Michael T Postek, Marylyn H. Bennett, N J Zaluzec
Abstract: When a contamination event occurs in a semiconductor fab, a process engineer must act quickly to find the cause. It is cost-prohibitive to maintain a full compliment of analytical tools in a fab that would be necessary to identify very small particle ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820944

905. Tip Characterization for Dimensional Nanometrology
Topic: Manufacturing
Published: 1/1/1999
Author: John S Villarrubia
Abstract: Technological trends are increasingly requiring dimensional metrology at size scales below a micrometer. Scanning probe microscopy has unique advantages in this size regime, but width and roughness measurements must be corrected for imaging artifacts ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822459

906. Accuracy Differences Among Photomask Metrology Tools and Why They Matter
Topic: Manufacturing
Published: 12/1/1998
Author: James Edward Potzick
Abstract: A variety of different kinds of photomask critical dimensions (CD) metrology tools are available today to help meet current and future metrology challenges. These tools are based on different operating principles, and have different cost, throughput, ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820908

907. Characterization and Applications of On-Wafer Diode Noise Sources
Topic: Manufacturing
Published: 12/1/1998
Authors: Lawrence P. Dunleavy, James Paul Randa, David K Walker, Robert L Billinger, Joseph Paul Rice
Abstract: A set of wafer-probeable diode noise source transfer standards are characterized using on-wafer noise-temperature methods developed at the National Institute of Standards and Technology (NIST), Boulder, CO.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=5598

908. Calculation of Measurement Uncertainty Using Prior Information
Topic: Manufacturing
Published: 11/1/1998
Authors: Steven David Phillips, William Tyler Estler
Abstract: We describe the use of Bayesian inference to include prior information about the value of the measurand in the calculation of measurement uncertainty. Typical examples show this can, in effect, reduce the expanded uncertainty by up to 85 %. The ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820904

909. Improving Pitch and Step Height Measurements Using the Calibrated Atomic Force Microscope
Topic: Manufacturing
Published: 11/1/1998
Authors: R Koning, Ronald G Dixson, Joseph Fu, V W. Tsai
Abstract: No abstract.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823080

910. A Simple Technique for Observing Fringe Interpolation Errors in Michelson Interferometers
Topic: Manufacturing
Published: 10/1/1998
Authors: Jack A Stone Jr, Lowell P. Howard
Abstract: We describe a simple, convenient method for measuring nonlinearities in displacement-measuring Michelson interferometers. Nonlinearities with a spatial periodicity of one optical fringe are a well-known source of error in precision interferometry. Ou ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820913



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