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You searched on: Topic Area: Manufacturing

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Displaying records 991 to 1000.
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991. Wavelength-Shift Interferometry: Using a Dither to Improve Accuracy
Topic: Manufacturing
Published: 1/1/1996
Authors: Jack A Stone Jr., Alois Stejskal, Lowell P. Howard
Abstract: A dither in path length can dramatically improve the accuracy of wavelength-shift methods used for absolute distance interferometry. Here we report how a dither improves the accuracy of absolute distance measurement by two orders of magnitude, reduci ...

992. Visualization of Surface Figure Using Zernike Polynomials
Topic: Manufacturing
Published: 12/1/1995
Authors: Christopher J. Evans, R E. Parks, P Sullivan, John S Taylor
Abstract: Commercial software in modern interferometers used in optical testing frequently fit the wave-front or surface-figure error to Zernike polynomials; typically 37 coefficients are provided. We provide visual representations of these data in a form that ...

993. Stylus Technique for Direct Verification of Rockwell Diamond Indenters
Topic: Manufacturing
Published: 11/23/1995
Authors: Jun-Feng Song, F Rudder, Theodore Vincent Vorburger, J Smith
Abstract: Based on a stylus technique, a microform calibration system was developed at NIST for the direct verification of Rockwell diamond indenters. The least-squares radius and profile deviations, cone angle and cone flank straightness, and the holder axis ...

994. Blind Estimation of Tip Geometry from Noisy Images
Series: NIST Interagency/Internal Report (NISTIR)
Report Number: 5752
Topic: Manufacturing
Published: 11/2/1995
Author: John S Villarrubia
Abstract: Broadening of image features due to non-vanishing tip size is a well-known imaging artifact in scanned probe microscopy (SPM) topographs. This need not be a serious limitation for some types of metrology (e.g. pitch or height), but it is significant ...

995. Fabrication Issues for the Prototype NIST SRM 2090A SEM Magnification Calibration Standard
Topic: Manufacturing
Published: 11/1/1995
Authors: B Newell, Michael T Postek, J VanDerZiel
Abstract: A new National Institute of Standards and Technology scanning electron microscope magnification calibration standard has been fabricated and distributed in production prototype form. The SRM 2090A samples contain structures ranging in pitch from 3000 ...

996. Test of a Slow Off-Axis Parabola at it
Topic: Manufacturing
Published: 11/1/1995
Authors: R E. Parks, Christopher J. Evans, Lianzhen Shao
Abstract: We describe the interferometric testing of a slow (f/16 at the center of curvature) off-axis parabola, intended for use in an x-ray spectrometer, that uses a spherical wave front matched to the mean radius of the asphere. We find the figure error in ...

997. 1/N Feynman Machines as a Path to Ultraminiaturization
Topic: Manufacturing
Published: 9/1/1995
Author: E Clayton Teague
Abstract: The possibility of implementing Feynman''s proposal for achieving ultraminiaturization by an iterative process of three-dimensional machines making ever-smaller three-dimensional machines is considered in the nature of a thought experiment. A large a ...

998. Application of the Prototype NIST SRM 2090a SEM Magnification Standard in a Manufacturing Environment
Topic: Manufacturing
Published: 9/1/1995
Authors: B Newell, Michael T Postek, J VanDerZiel
Abstract: The first NIST-traceable SEM magnification calibration standard designed to meet the particular needs of the micromanufacturing industry has been fabricated and characterized in production prototype form. The SRM 2090A samples contain structures rang ...

999. Generic Technology, Measurement and Standards Issues in Micromachining and Microfabrication
Topic: Manufacturing
Published: 9/1/1995
Author: Dennis A Swyt
Abstract: Microelectromechanical systems (MEMS) are integrally-fabricated hybrids of micromechanical and microelectronic elements which serve together as sensors, actuators, or both. While there are proprietary issues in MEMS products currently in or near comm ...

1000. Microform Calibration Uncertainties of Rockwell Diamond Indenters
Topic: Manufacturing
Published: 9/1/1995
Authors: Jun-Feng Song, F Rudder, Theodore Vincent Vorburger, J Smith
Abstract: National and international comparisons in Rockwell hardness tests show significant differences. Uncertainties in the geometry of the Rockwell diamond indenters are largely responsible for these differences. By using a stylus instrument, with a series ...

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