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You searched on: Topic Area: Optical Metrology Sorted by: title

Displaying records 31 to 40 of 53 records.
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31. Monitoring Photothermally Excited Nanoparticles via Multimodal Microscopy
Topic: Optical Metrology
Published: 5/19/2010
Authors: Matthew Lawrence Clarke, Shin G. Chou, Jeeseong Hwang
Abstract: Generation of heat using optically excited nanoparticles can be beneficial or detrimental depending on the application. Therefore, clinically applicable studies are being pursued in an effort to achieve safe practices of nanoparticle-induced hyperth ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=905276

32. Mueller matrix ellipsometry of artificial non-periodic line edge roughness in presence of finite numerical aperture
Topic: Optical Metrology
Published: 4/20/2011
Authors: Thomas Avery Germer, Martin Foldyna, Brent Bergner
Abstract: We used azimuthally-resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line edge roughness (LER). The unperturbed, reference grating profile was determined from multip ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908372

33. Multiple-order Imaging for Optical Critical Dimension Metrology using Microscope Characterization
Topic: Optical Metrology
Published: 10/11/2012
Authors: Jing Qin, Hui Zhou, Bryan M Barnes, Francois R. Goasmat, Ronald G Dixson, Richard M Silver
Abstract: There has been much recent work in developing advanced optical metrology applications that use imaging optics for optical critical dimension (OCD) measurements, defect detection, and for potential use with in-die metrology applications. We have previ ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912169

34. Nanometrology Using Through-Focus Scanning Optical Microscopy Method
Topic: Optical Metrology
Published: 12/21/2011
Authors: Ravikiran Attota, Richard M Silver
Abstract: We present an initial review of a novel through-focus scanning optical microscopy (TSOM) imaging method that produces nanometer dimensional measurement sensitivity using a conventional bright-field optical microscope. In the TSOM method a target is ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=905395

35. Nanoscale Specific Heat Capacity Measurements Using Optoelectronic Bilayer Microcantilevers
Topic: Optical Metrology
Published: 12/12/2012
Authors: Brian G. (Brian Gregory) Burke, William A Osborn, Richard Swift Gates, David A LaVan
Abstract: We describe a new technique for optically and electrically detecting and heating bilayer microcantilevers (Pt−SiNx) to high temperatures at fast heating rates for nanoscale specific heat capacity measurements. The bilayer microcantilever acts s ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912233

36. Photomask metrology using a 193 nm scatterfield microscope
Topic: Optical Metrology
Published: 9/30/2009
Authors: Richard Quintanilha, Bryan M Barnes, Martin Y Sohn, Lowell P. Howard, Richard M Silver, James Edward Potzick, Michael T. Stocker
Abstract: The current photomask linewidth Standard Reference Material (SRM) supplied by the National Institute of Standards and Technology (NIST), SRM 2059, is the fifth generation of such standards for mask metrology. The calibration of this mask has been ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=903929

37. Practical Use and Calculation of CCT and Duv
Topic: Optical Metrology
Published: 10/18/2013
Author: Yoshihiro Ohno
Abstract: The Correlated Color Temperature (CCT) is often used to represent chromaticity of white light sources, but chromaticity is two-dimensional, and another dimension, the distance from the Planckian locus, is often missing. Duv is defined in ANSI C78.377 ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912622

38. Progress toward redetermining the Boltzmann constant with a fixed-path-length cylindrical resonator
Topic: Optical Metrology
Published: 5/21/2011
Authors: Jintao Zhang, H. Lin, X.J. Feng, J.P. Sun, Keith A Gillis, Michael R Moldover, Y.Y. Duan
Abstract: We used a single, fixed-path-length cylindrical-cavity resonator to measure {I}c{/I}^d0^ = (307.8252 {+ or -} 0.0012) m{bullet}s^u−1^, the zero-density limit of the speed of sound in pure argon at the temperature of the triple point of water. ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907610

39. Quantum radiometry
Topic: Optical Metrology
Published: 5/2/2009
Authors: Sergey V Polyakov, Alan L Migdall
Abstract: We review radiometric techniques that take advantage of photon counting and stem from the quantum laws of nature. We present a brief history of metrological experiments and review the current state of experimental quantum radiometry.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=902273

40. Rapid and precise absolute distance measurements at long range
Topic: Optical Metrology
Published: 6/1/2009
Authors: Ian R Coddington, William C Swann, Ljerka Nenadovic, Nathan Reynolds Newbury
Abstract: The ability to determine absolute distance to an object is one of the most basic measurements of remote sensing. High precision ranging has important applications in both large-scale manufacturing and in future tight formation-flying satellite missio ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901111



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