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You searched on: Topic Area: Optical Metrology Sorted by: title

Displaying records 31 to 40 of 61 records.
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31. Metrologia
Topic: Optical Metrology
Published: 7/8/2011
Authors: Uwe Arp, Zhigang Li, Ping-Shine Shaw, Mathias Richter, Roman Klein, Wolfgang Paustian, Reiner Thornagel
Abstract: We report on a successful bilateral inter-comparison between the Physikalisch-Technische Bundesanstalt (PTB) and the National Institute of Standards and Technology (NIST). In both laboratories deuterium lamps were calibrated using the calculability o ...

32. Microwave generation with low residual phase noise from a femtosecond fiber laser with an intracavity electro-optic modulator
Topic: Optical Metrology
Published: 11/14/2011
Authors: William C Swann, Esther Baumann, Fabrizio Raphael Giorgetta, Nathan Reynolds Newbury
Abstract: Low phase-noise microwave generation has previously been demonstrated using self-referenced frequency combs to divide down a low noise optical reference. We demonstrate an approach based on a fs Er-fiber laser that avoids the complexity of self-refer ...

33. Mode reconstruction of a light field by multi-photon statistics
Topic: Optical Metrology
Published: 7/15/2013
Authors: Elizabeth A Goldschmidt, Fabrizio Piacentini, I. Ruo Berchera, Sergey V Polyakov, Silke Peters, Stefan Kuck, Giorgio Brida, Ivo Pietro Degiovanni, Alan L Migdall, Marco Genovese
Abstract: Knowing the underlying number and structure of occupied modes of a light field plays a crucial role in minimizing loss and decoherence of quantum information. Typically, full characterization of the mode structure involves a series of several separ ...

34. Monitoring Photothermally Excited Nanoparticles via Multimodal Microscopy
Topic: Optical Metrology
Published: 5/19/2010
Authors: Matthew Lawrence Clarke, Shin G. Chou, Jeeseong Hwang
Abstract: Generation of heat using optically excited nanoparticles can be beneficial or detrimental depending on the application. Therefore, clinically applicable studies are being pursued in an effort to achieve safe practices of nanoparticle-induced hyperth ...

35. Mueller matrix ellipsometry of artificial non-periodic line edge roughness in presence of finite numerical aperture
Topic: Optical Metrology
Published: 4/20/2011
Authors: Thomas Avery Germer, Martin Foldyna, Brent Bergner
Abstract: We used azimuthally-resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line edge roughness (LER). The unperturbed, reference grating profile was determined from multip ...

36. Multiple-order Imaging for Optical Critical Dimension Metrology using Microscope Characterization
Topic: Optical Metrology
Published: 10/11/2012
Authors: Jing Qin, Hui Zhou, Bryan M Barnes, Francois R. Goasmat, Ronald G Dixson, Richard M Silver
Abstract: There has been much recent work in developing advanced optical metrology applications that use imaging optics for optical critical dimension (OCD) measurements, defect detection, and for potential use with in-die metrology applications. We have previ ...

37. Nanometrology Using Through-Focus Scanning Optical Microscopy Method
Topic: Optical Metrology
Published: 12/21/2011
Authors: Ravikiran Attota, Richard M Silver
Abstract: We present an initial review of a novel through-focus scanning optical microscopy (TSOM) imaging method that produces nanometer dimensional measurement sensitivity using a conventional bright-field optical microscope. In the TSOM method a target is ...

38. Nanoscale Specific Heat Capacity Measurements Using Optoelectronic Bilayer Microcantilevers
Topic: Optical Metrology
Published: 12/12/2012
Authors: Brian G. (Brian Gregory) Burke, William A Osborn, Richard Swift Gates, David A LaVan
Abstract: We describe a new technique for optically and electrically detecting and heating bilayer microcantilevers (Pt−SiNx) to high temperatures at fast heating rates for nanoscale specific heat capacity measurements. The bilayer microcantilever acts s ...

39. On-Chip Integrated Silicon Photonic Thermometers
Topic: Optical Metrology
Published: 9/1/2015
Authors: Nikolai Nikolayevich Klimov, Thomas P Purdy, Zeeshan Ahmed
Abstract: The fundamental limitations of resistance-based thermometry and the desire to reduce sensor ownership have produced considerable interest in the development of photonics-based temperature sensors as an alternative to resistance thermometers. Photonic ...

40. Optomechanical Motion Sensors
Topic: Optical Metrology
Published: 7/8/2015
Authors: Felipe Guzman, Oliver Gerberding, John T. Melcher, Julian Stirling, Jon Robert Pratt, Gordon Allan Shaw, Jacob M Taylor
Abstract: Compact optical cavities can be combined with motion sensors to yield unprecedented resolution and SI-traceability in areas such as acceleration sensing and atomic force microscopy AFM, among others. We have incorporated Fabry-Perot fiber-optic m ...

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