NIST logo

Publications Portal

You searched on: Topic Area: Optical Metrology Sorted by: title

Displaying records 31 to 40 of 55 records.
Resort by: Date / Title

31. Mode reconstruction of a light field by multi-photon statistics
Topic: Optical Metrology
Published: 7/15/2013
Authors: Elizabeth A Goldschmidt, Fabrizio Piacentini, I. Ruo Berchera, Sergey V Polyakov, Silke Peters, Stefan Kuck, Giorgio Brida, Ivo Pietro Degiovanni, Alan L Migdall, Marco Genovese
Abstract: Knowing the underlying number and structure of occupied modes of a light field plays a crucial role in minimizing loss and decoherence of quantum information. Typically, full characterization of the mode structure involves a series of several separ ...

32. Monitoring Photothermally Excited Nanoparticles via Multimodal Microscopy
Topic: Optical Metrology
Published: 5/19/2010
Authors: Matthew Lawrence Clarke, Shin G. Chou, Jeeseong Hwang
Abstract: Generation of heat using optically excited nanoparticles can be beneficial or detrimental depending on the application. Therefore, clinically applicable studies are being pursued in an effort to achieve safe practices of nanoparticle-induced hyperth ...

33. Mueller matrix ellipsometry of artificial non-periodic line edge roughness in presence of finite numerical aperture
Topic: Optical Metrology
Published: 4/20/2011
Authors: Thomas Avery Germer, Martin Foldyna, Brent Bergner
Abstract: We used azimuthally-resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line edge roughness (LER). The unperturbed, reference grating profile was determined from multip ...

34. Multiple-order Imaging for Optical Critical Dimension Metrology using Microscope Characterization
Topic: Optical Metrology
Published: 10/11/2012
Authors: Jing Qin, Hui Zhou, Bryan M Barnes, Francois R. Goasmat, Ronald G Dixson, Richard M Silver
Abstract: There has been much recent work in developing advanced optical metrology applications that use imaging optics for optical critical dimension (OCD) measurements, defect detection, and for potential use with in-die metrology applications. We have previ ...

35. Nanometrology Using Through-Focus Scanning Optical Microscopy Method
Topic: Optical Metrology
Published: 12/21/2011
Authors: Ravikiran Attota, Richard M Silver
Abstract: We present an initial review of a novel through-focus scanning optical microscopy (TSOM) imaging method that produces nanometer dimensional measurement sensitivity using a conventional bright-field optical microscope. In the TSOM method a target is ...

36. Nanoscale Specific Heat Capacity Measurements Using Optoelectronic Bilayer Microcantilevers
Topic: Optical Metrology
Published: 12/12/2012
Authors: Brian G. (Brian Gregory) Burke, William A Osborn, Richard Swift Gates, David A LaVan
Abstract: We describe a new technique for optically and electrically detecting and heating bilayer microcantilevers (Pt−SiNx) to high temperatures at fast heating rates for nanoscale specific heat capacity measurements. The bilayer microcantilever acts s ...

37. Photomask metrology using a 193 nm scatterfield microscope
Topic: Optical Metrology
Published: 9/30/2009
Authors: Richard Quintanilha, Bryan M Barnes, Martin Y Sohn, Lowell P. Howard, Richard M Silver, James Edward Potzick, Michael T. Stocker
Abstract: The current photomask linewidth Standard Reference Material (SRM) supplied by the National Institute of Standards and Technology (NIST), SRM 2059, is the fifth generation of such standards for mask metrology. The calibration of this mask has been ...

38. Practical Use and Calculation of CCT and Duv
Topic: Optical Metrology
Published: 10/18/2013
Author: Yoshihiro Ohno
Abstract: The Correlated Color Temperature (CCT) is often used to represent chromaticity of white light sources, but chromaticity is two-dimensional, and another dimension, the distance from the Planckian locus, is often missing. Duv is defined in ANSI C78.377 ...

39. Progress toward redetermining the Boltzmann constant with a fixed-path-length cylindrical resonator
Topic: Optical Metrology
Published: 5/21/2011
Authors: Jintao Zhang, H. Lin, X.J. Feng, J.P. Sun, Keith A Gillis, Michael R Moldover, Y.Y. Duan
Abstract: We used a single, fixed-path-length cylindrical-cavity resonator to measure {I}c{/I}^d0^ = (307.8252 {+ or -} 0.0012) m{bullet}s^u−1^, the zero-density limit of the speed of sound in pure argon at the temperature of the triple point of water. ...

40. Quantum radiometry
Topic: Optical Metrology
Published: 5/2/2009
Authors: Sergey V Polyakov, Alan L Migdall
Abstract: We review radiometric techniques that take advantage of photon counting and stem from the quantum laws of nature. We present a brief history of metrological experiments and review the current state of experimental quantum radiometry.

Search NIST-wide:

(Search abstract and keywords)

Last Name:
First Name:

Special Publications:

Looking for a NIST Special Publication (NIST SP Series)? Place the series number and dash in the report number field (Example: 800-) and begin your search.

  • SP 250-XX: Calibration Services
  • SP 260-XX: Standard Reference Materials
  • SP 300-XX: Precision Measurement and Calibration
  • SP 400-XX: Semiconductor Measurement Technology
  • SP 480-XX: Law Enforcement Technology
  • SP 500-XX: Computer Systems Technology
  • SP 700-XX: Industrial Measurement Series
  • SP 800-XX: Computer Security Series
  • SP 823-XX: Integrated Services Digital Network Series