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Displaying records 1 to 10 of 56 records.
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1. 3-D Optical Metrology of Finite sub-20 nm Dense Arrays using Fourier Domain Normalization
Topic: Optical Metrology
Published: 3/25/2013
Authors: Jing Qin, Hui Zhou, Bryan M Barnes, Ronald G Dixson, Richard M Silver
Abstract: Reduced target dimensions requiring improved resolution and sensitivity have driven the need to use and analyze the phase and scattered frequency information available when using image-based scatterometry systems. One such system is scatterfield micr ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912961

2. A compact and robust method for full Stokes spectropolarimetry
Topic: Optical Metrology
Published: 8/1/2012
Authors: William Sparks, Thomas Avery Germer, John MacKenty, Frans Snik
Abstract: We present an approach to spectropolarimetry which requires neither moving parts nor time dependent modulation, and which o ers the prospect of achieving high sensitivity. The concept, which is one of those generically known as channeled polarimetry, ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=911231

3. Accurate, inexpensive testing of handheld lasers for safe use and operation
Topic: Optical Metrology
Published: 3/7/2013
Authors: Marla L Dowell, Joshua Aram Hadler
Abstract: An accurate, inexpensive test bed for measurements of optical power emitted from handheld lasers is described. Our test bed consists of a thermopile detector, bandpass optical filters, an adjustable iris, and self-centering holders for mounting of th ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912781

4. Adaptive measurements in nonorthogonal state discrimination
Topic: Optical Metrology
Published: 12/18/2012
Authors: Francisco E. Becerra Chavez, Alan L Migdall
Abstract: Adaptive measurements represent important resources in quantum information science and quan- tum technologies. They take advantage of the knowledge of partial measurements of the system to optimize subsequent measurements and perform tasks that are ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912397

5. An analysis of the nonlinear spectral mixing of didymium and soda-lime glass beads using hyperspectral imagery (HSI) microscopy
Topic: Optical Metrology
Published: 6/13/2014
Authors: Ronald Resmini, Robert S Rand, Christopher Deloye, David W Allen
Abstract: Nonlinear spectral mixing occurs when materials are intimately mixed. Intimate mixing is a common characteristic of granular materials such as soils. A linear spectral unmixing inversion applied to a nonlinear mixture will yield subpixel abundance es ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=915979

6. CCPR-S1 Supplementary Comparison for Spectral Radiance in the range of 220 nm to 2500 nm
Topic: Optical Metrology
Published: 6/2/2009
Authors: Boris Khlevnoy, Victor Sapritsky, Bernard Rougie, Charles E Gibson, Howard W Yoon, Arnold A. Gaertner, Dieter Taubert, Juergen Hartmann
Abstract: In 1997, the Consultative Committee for Photometry and Radiometry (CCPR) initiated a supplementary comparison of spectral radiance in the wavelength range from 220 nm to 2500 nm (CCPR S1) using tungsten -strip filament lamps as transfer standards. Fi ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=900253

7. Characterization of an Optical Time Domain Reflectometer Calibrator
Topic: Optical Metrology
Published: 3/1/2007
Authors: Donald R Larson, Nicholas G Paulter Jr., Kenneth C Blaney
Abstract: We report the results of an investigation into the signal characteristics and behavior of an instrument used to calibrate Optical Time Domain Reflectometers. This instrument implements the Telecommunications Industry Association standard TIA/EIA-455- ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=32449

8. Dual frequency combs at 3.4 µm with subhertz residual linewidths
Topic: Optical Metrology
Published: 5/1/2010
Authors: Esther Baumann, Fabrizio Raphael Giorgetta, Ian R Coddington, William C Swann, Nathan Reynolds Newbury
Abstract: Two coherent 1.5-µm frequency combs are transferred to 3.4 µm by difference frequency generation with a 1064 nm cw laser. From a multi-heterodyne measurement, the residual linewidth between the comb teeth is resolution-limited at 200 mHz.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=904566

9. Effects of Roughness on Scatterometry Signatures
Topic: Optical Metrology
Published: 5/26/2011
Authors: Martin Foldyna, Thomas Avery Germer, Brent Bergner
Abstract: We used azimuthally-resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line edge roughness (LER). Grating profiles were determined from multiple azimuthal configuratio ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908805

10. Enhancing 9 nm Node Dense Patterned Defect Optical Inspection using Polarization, Angle, and Focus
Topic: Optical Metrology
Published: 4/10/2013
Authors: Bryan M Barnes, Francois R. Goasmat, Martin Y Sohn, Hui Zhou, Abraham Arceo
Abstract: To measure the new SEMATECH 9 nm node Intentional Defect Array (IDA) and subsequent small, complex defects, a methodology has been used to exploit the rich information content generated when simulating or acquiring several images of sub-wavelength-si ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913542



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