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You searched on: Topic Area: Nanomanufacturing

Displaying records 31 to 37.
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31. High resolution full-field imaging of nanostructures using compact extreme ultraviolet lasers
Topic: Nanomanufacturing
Published: 7/21/2008
Authors: Norman A Sanford, F Brizuela, Kristine A Bertness
Abstract: Recent advances in the development of high peak brightness table-top extreme ultraviolet (EUV) and soft x-ray (SRX) lasers have opened new opportunities for the demonstration of compact full-field EUV/SXR microscopes capable of capturing images with ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908697

32. Optical Through-Focus Technique that Differentiates Small Changes in Line Width, Line Height and Sidewall Angle for CD, Overlay, and Defect Metrology Applications
Topic: Nanomanufacturing
Published: 4/16/2008
Authors: Ravikiran Attota, Richard M Silver, Bryan M Barnes
Abstract: We present a new optical technique for dimensional analysis of sub 100 nm sized targets by analyzing through-focus images obtained using a conventional bright-field optical microscope.  We present a method to create through-focus image maps (TFIM) us ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=824634

33. Towards Accurate Feature Shape Metrology
Topic: Nanomanufacturing
Published: 3/22/2008
Authors: Ndubuisi George Orji, Ronald G Dixson, B Bunday, J Allgair
Abstract: Over the last few years, the need for shape metrology for process control has increased. A key component of shape metrology is sidewall angle (SWA). However, few instruments measure SWA directly. The critical dimension atomic force microscope (CD-AFM ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=824629

34. Integration, Interoperability, and Information Management: What are the Key Issues to Nanomanufacturing?
Topic: Nanomanufacturing
Published: 9/1/2007
Author: Kevin W Lyons
Abstract: Nanomanufacturing can be defined as all manufacturing activities that collectively support an approach to design, produce, control, modify, manipulate, and assemble nanometer scale objects and features for the purpose of fabricating a product or syst ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822744

35. NIST's Logistics Integration Solutions
Series: Letter Circular
Topic: Nanomanufacturing
Published: 9/1/2004
Author: Sharon J. Kemmerer
Abstract: The NIST Manufacturing Interoperability Program staff has years of experience developing standards, validating solutions, and providing interoperability results in the field of manufacturing. Building on this experience, NIST can: (1) Work with indu ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822197

36. Capacitive readout technique for studies of dissipation in GaN nanowire mechanical resonators
Topic: Nanomanufacturing
Published: Date unknown
Authors: Kristine A Bertness, Joshua R. Montague, Norman A Sanford, Victor Bright, C. T. Rogers
Abstract: A variable-temperature, homodyne reflectometry measurement technique for detecting nanoscale mechanical motion has recently been developed. We have extended this technique to make the first all-electrical measurements of an ensemble of as-grown, c-a ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908641

37. Catalyst-free GaN Nanowires as Nanoscale Light Emitters
Topic: Nanomanufacturing
Published: Date unknown
Authors: Kristine A Bertness, Norman A Sanford, John B Schlager, Alexana Roshko, Todd E Harvey, Paul Timothy Blanchard, Matthew David Brubaker, Andrew M. Herrero, Aric Warner Sanders
Abstract: Catalyst-free growth of GaN nanowires with molecular beam epitaxy produces material of exceptionally high quality with long minority carrier lifetimes and low surface recombination velocity. The nanowires grow by thermodynamic driving forces that enh ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910889



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