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Topic Area: Metrology
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Displaying records 801 to 810 of 850 records.
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801. Ultrashallow Depth Profiling with Time-of-flight Secondary Ion Mass Spectrometry
Topic: Metrology
Published: 1/1/1994
Authors: J. Bennett, John A. Dagata
Abstract: Time-of-flight secondary ion mass spectrometry (TOF-SIMS) is an efficient, sensitive method for characterizing semiconductor surfaces. In addition, TOF-SIMS can be applied in a depth profiling mode allowing qualitative characterization of the top 10? ...

802. Ultrastable Laser Array at 633 nm for Real-Time Dimensional Metrology
Topic: Metrology
Published: 1/1/2001
Authors: Y Lecoq, J Pedulla, John Russell Lawall
Abstract: We describe a laser system for very high-accuracy dimensional metrology. A sealed-cavity helium-neon laser is offset-locked to an iodine-stabilized laser in order to realize a secondary standard with higher power and less phase noise. Synchronous ave ...

803. Unbiased Estimation of Linewidth Roughness
Topic: Metrology
Published: 5/1/2005
Authors: John S Villarrubia, B Bunday
Abstract: Line width roughness (LWR) is usually estimated simply as three standard deviations of the line width. The effect of image noise upon this metric includes a positive nonrandom component. The metric is therefore subject to a bias or ?systematic error? ...

804. Uncertainties in Dimensional Measurements Made at Nonstandard Temperatures
Topic: Metrology
Published: 1/1/1994
Author: Dennis A Swyt
Abstract: This report examines the effects of uncertainties in temperature and coefficient of thermal expansion on the expanded uncertainty of length dimensional measurements made away from the international standard reference temperature of 20degrees C for ar ...

805. Uncertainties in Small-Angle Measurement Systems Used to Calibrate Angle Artifacts
Topic: Metrology
Published: 5/1/2004
Authors: Jack A Stone Jr, M Amer, Bryon S. Faust, Jay H Zimmerman
Abstract: We have studied a number of effects that can give rise to errors in small-angle measurement systems when they are used to calibrate artifacts such as optical polygons. Of these sources of uncertainty, the most difficult to quantify are errors associa ...

806. Uncertainty Analysis for Angle Calibrations Using Circle Closure
Topic: Metrology
Published: 3/1/1998
Author: William Tyler Estler
Abstract: We analyze two types of full-circle angle calibrations: a simple closure in which a single set of unknown angular segments is sequentially compared with an unknown reference angle, and a dual closure in which two divided circles are simultaneously ca ...

807. Uncertainty Analysis for Angle Calibrations Using Circle Closure
Series: Journal of Research (NIST JRES)
Topic: Metrology
Published: 3/1/1998
Author: William Tyler Estler

808. Uncertainty Due to Finite Resolution Measurements
Topic: Metrology
Published: 1/1/2004
Authors: Steven David Phillips, B Tolman, William Tyler Estler
Abstract: We investigate the influence of finite resolution on measurement uncertainty from a perspective of the Guide to the Expression of Uncertainty in Measurement (GUM). Finite resolution in the presence of Gaussian noise yields a distribution of results t ...

809. Uncertainty Estimation for Multiposition Form Error Metrology
Topic: Metrology
Published: 9/1/1997
Authors: William Tyler Estler, Christopher J. Evans, Lianzhen Shao
Abstract: We analyze a general multiposition comparator measurement procedure that leads to partial removal of artifact error for a class of problems including roundness metrology, measurement of radial error motions of precision spindles, and figure error met ...

810. Uncertainty Procedure for NIST Surface Finish and Microform Calibration
Topic: Metrology
Published: 1/1/1996
Authors: Jun-Feng Song, Theodore Vincent Vorburger
Abstract: An uncertainty procedure is used for reporting the NIST surface finish and microform calibration uncertainties. The combined standard uncertainty is a combination of the uncertainty from the geometric non-uniformity of the measured surface, and the u ...

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