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Topic Area: Metrology
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Displaying records 791 to 800 of 846 records.
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791. Two-Dimensional Calibration Artifact and Measurement Methodology
Topic: Metrology
Published: 6/1/1999
Authors: Richard M Silver, Theodore D Doiron, William B. Penzes, S Fox, Edward A Kornegay, S Rathjen, M Takac, D Owen
Abstract: In this paper, we describe our design and the manufacturing of a two-dimensional grid artifact of chrome on quartz on a 6 inch by 6 inch by .250 glass blank. The design has been agreed upon by a number of SEMI participants working on a two-dimensiona ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820948

792. Two-Dimensional Simulation and Modeling in Scanning Electron Microscope Imaging and Metrology Research
Topic: Metrology
Published: 7/1/2002
Authors: Michael T Postek, Andras Vladar, J R. Lowney, William J. Keery
Abstract: Traditional Monte Carlo modeling of the electron beam specimen interactions in a scanning electron microscope (SEM) produces information about electron beam penetration and output signal generation at either a single beam landing location, or multipl ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822435

793. Two-dimensional Simulation Modeling in Imaging and Metrology Research
Topic: Metrology
Published: 7/1/2002
Authors: Michael T Postek, Andras Vladar, J R. Lowney, William J. Keery
Abstract: Traditional Monte Carlo modeling of the electron beam-specimen interactions in a scanning electron microscope (SEM) produces information about electron beam penetration and output signal generation at either a single beam-landing location, or multipl ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=821738

794. U.S. Navy Coordinate Measuring Machines: A Study of Needs
Series: NIST Interagency/Internal Report (NISTIR)
Report Number: 5379
Topic: Metrology
Published: 1/1/1994
Authors: David C Stieren, Ralph C. Veale, Howard H. Harary, Shaw C Feng
Abstract: Abstract not available.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820716

795. USARSim/ROS: A Combined Framework for Robotic Control and Simulation
Topic: Metrology
Published: 6/20/2012
Authors: Stephen B. Balakirsky, Zeid Kootbally
Abstract: The Robot Operating System (ROS) has been steadily gaining popularity among robotics researchers as an open source framework for robot control. The Unified System for Automation and Robot Simulation (USARSim) has been used for many years by robotics ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910918

796. Ultra-Precision Linear Motion Metrology of a Commerically Available Linear Translation Stage
Topic: Metrology
Published: 11/18/2011
Authors: Ronnie R Fesperman, M Alkan Donmez, Shawn P Moylan
Abstract: Many new compact ultra-precision linear translation stages with exceptionally long ranges of motion on the order of tens of millimeters and positioning resolutions on the order of a nanometer are finding their way into emerging nanotechnologies. Thi ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=909376

797. Ultrashallow Depth Profiling with Time-of-flight Secondary Ion Mass Spectrometry
Topic: Metrology
Published: 1/1/1994
Authors: J. Bennett, John A. Dagata
Abstract: Time-of-flight secondary ion mass spectrometry (TOF-SIMS) is an efficient, sensitive method for characterizing semiconductor surfaces. In addition, TOF-SIMS can be applied in a depth profiling mode allowing qualitative characterization of the top 10? ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820671

798. Ultrastable Laser Array at 633 nm for Real-Time Dimensional Metrology
Topic: Metrology
Published: 1/1/2001
Authors: Y Lecoq, J Pedulla, John Russell Lawall
Abstract: We describe a laser system for very high-accuracy dimensional metrology. A sealed-cavity helium-neon laser is offset-locked to an iodine-stabilized laser in order to realize a secondary standard with higher power and less phase noise. Synchronous ave ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822441

799. Unbiased Estimation of Linewidth Roughness
Topic: Metrology
Published: 5/1/2005
Authors: John S Villarrubia, B Bunday
Abstract: Line width roughness (LWR) is usually estimated simply as three standard deviations of the line width. The effect of image noise upon this metric includes a positive nonrandom component. The metric is therefore subject to a bias or ?systematic error? ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822373

800. Uncertainties in Dimensional Measurements Made at Nonstandard Temperatures
Topic: Metrology
Published: 1/1/1994
Author: Dennis A Swyt
Abstract: This report examines the effects of uncertainties in temperature and coefficient of thermal expansion on the expanded uncertainty of length dimensional measurements made away from the international standard reference temperature of 20degrees C for ar ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820722



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