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Topic Area: Metrology

Displaying records 791 to 800 of 851 records.
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791. Improving Photomask Linewidth Measurement Accuracy via Emulated Stepper Aerial Image Measurement
Topic: Metrology
Published: 12/1/1994
Author: James Edward Potzick
Abstract: Photomask linewidth measurements are needed for vendor/buyer communication, for developing specifications and ensuring that products meet specifications, and sometimes for legal compliance. Linewidths are also measured for process monitoring for eith ...

792. Parameters Characterizing a Critical Dimension Measurement
Topic: Metrology
Published: 12/1/1994
Authors: Robert D. Larrabee, Michael T Postek
Abstract: There are a number of parameters used to characterize a measurement result for the purposes of specifying its value for the intended purpose. Precision (variability) and accuracy (correctness) are two of the more often used parameters and, like many ...

793. Ambient and Vacuum Scanning Tunneling Spectroscopy of Sulfur and Oxygen-Terminated Gallium Arsenide
Topic: Metrology
Published: 11/1/1994
Authors: Richard M Silver, John A. Dagata, H. W. Tseng
Abstract: Tunneling spectroscopy of sulfur- and oxygen-terminated n- and p-type GaAs (110) surfaces is reported for air and ultrahigh-vacuum conditions. Simulations of the complete I-V characteristics with explicit inclusion of surface states within the planar ...

794. Comprehensive Study of Parameters for Characterizing 3-D Surface Topography III: Parameters for Amplitude and Some Functional Properties
Topic: Metrology
Published: 11/1/1994
Authors: W Dong, P Sullivan, K Stout
Abstract: It is recognized that profiling techniques have been widely used in industry and academic research for manufacturing control and functional control of surface roughness, in some cases, however, the profiling techniques and two-dimensional (2D) parame ...

795. Comprehensive Study of Parameters for Characterizing 3-D Surface Topography IV: Parameters for Characterizing Spatial and Hybrid Properties
Topic: Metrology
Published: 11/1/1994
Authors: W Dong, P Sullivan, K Stout
Abstract: This is the last part in a series of reports describing a comprehensive study of parameters to characterize three-dimensional surface topography. In conjunction with other parts of the report, this paper deals with parameters used to characterize spa ...

796. A Method for the Spatial Calibration of a Commercial Phase Measuring Interferometer-Practical Implementation
Topic: Metrology
Published: 10/1/1994
Authors: P Sullivan, Christopher J. Evans
Abstract: Abstract not available.

797. Dynamics and Structure of Self-Assembled Organic Molecules at the Solid-Liquid Interface
Topic: Metrology
Published: 10/1/1994
Authors: J Jorgensen, N Shcmeisser, J Garnaes, L Madsen, K Schaumburg, Larry Hansen
Abstract: We have analysed scanning tunnelling microscopc (STM) images of self-assembled didodecylbenzene (DDB) molecules physisorbed on graphite from a DDB solution using octylbenzene as solvent. The DDB images were obtained alternating with images of the gra ...

798. Design of an Atomic Force Microscope with Interferometric Position Control
Topic: Metrology
Published: 8/19/1994
Authors: J Schneir, T Mcwaid, J Alexander, B Wilfley
Abstract: Advances in the manufacture of integrated circuits, x?ray optics, magnetic read-write heads, optical data storage media, and razor blades require advances in ultraprecision metrology. Each of these industries is currently investigating the use of ato ...

799. Radiation Scattered by Two Touching Spheres
Topic: Metrology
Published: 6/20/1994
Author: Egon Marx
Abstract: During the manufacture of powder metal, the size distribution of the metal spheres can be determined to some extent by the distribution of light scattered by the spheres while they are streaming by a laser beam. Micrographs show the presence of chain ...

800. National Institute of Standards and Technology (NIST) J93 Project Proposal Report
Topic: Metrology
Published: 6/15/1994
Authors: Michael T Postek, Robert D. Larrabee, L Linholm, James Edward Potzick, J Schneir, T Mcwaid, Michael W Cresswell, Richard A Allen, E Clayton Teague
Abstract: Unavailable.

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