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You searched on: Author: John Kramar

Displaying records 1 to 10 of 60 records.
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1. Feasibility study on 3-D shape analysis of high-aspect-ratio features using through-focus scanning optical microscopy
Published: 7/14/2016
Authors: Ravikiran Attota, Peter Weck, John A Kramar, Bunday Benjamin, Victor H Vartanian
Abstract: In-line metrologies currently used in the semiconductor industry are being challenged by the aggressive pace of device scaling and the adoption of novel device architectures. Metrology and process control of three-dimensional (3D) high-aspect ...

2. Method for Measuring the Volume of Nominally 100 um Diameter Spherical Water-in-Oil Emulsion Droplets
Series: Special Publication (NIST SP)
Report Number: 260-184
Published: 7/13/2016
Authors: John A Dagata, Natalia Farkas, John A Kramar
Abstract: This report describes an equivalent volume measurement method using optical microscopy for estimating the mean volume of nominally 100 um diameter spherical droplets. The droplets are the aqueous phase of proprietary water in oil emulsions used i ...

3. Optimizing noise for defect analysis with through-focus scanning optical microscopy
Published: 3/25/2016
Authors: Ravikiran Attota, John A Kramar

4. Nanometer level sampling and control of a scanning electron microscope
Published: 6/2/2015
Authors: Bradley N Damazo, Andras Vladar, Olivier Marc Marie-Rose, John A Kramar
Abstract: The National Institute of Standards and Technology (NIST) is developing a specialized, metrology scanning electron microscope (SEM), having a metrology sample stage measured by a 38 picometer resolution, high-bandwidth laser interferometer system. Th ...

5. Reference Materials 8096 and 8097 - The MEMS 5-in-1 RMs: Homogeneous and Stable
Published: 5/14/2014
Authors: Janet M Cassard, Jon C Geist, John A Kramar
Abstract: The NIST Microelectromechanical Systems (MEMS) 5-in-1 Reference Materials (RMs) were developed to assist users in validating their use of five documentary standard test methods. A Reference Material can be defined as a material whose property values ...

6. Kinematic Modeling and Calibration of a Flexure Based Hexapod Nanopositioner
Published: 8/21/2012
Authors: Hongliang Shi, Hai-Jun Su, Nicholas G Dagalakis, John A Kramar
Abstract: This paper covers the kinematic modeling of a flexure-based, hexapod nanopositioner and a new method of calibration for this type of nanopositioner. This six degrees of freedom tri-stage nanopositioner can generate small displacement, high-resolution ...

7. Atomic Force Microscope Cantilever Flexural Stiffness Calibration: Toward a Standard Traceable Method
Series: Journal of Research (NIST JRES)
Published: 7/1/2011
Authors: Richard Swift Gates, Mark Reitsma, John A Kramar, Jon Robert Pratt
Abstract: The evolution of the atomic force microscope into a useful tool for measuring mechanical properties of surfaces at the nanoscale has spurred the need for more precise and accurate methods for calibrating the spring constants of test cantilevers. Gro ...

8. TSOM Method for Semiconductor Metrology
Published: 4/18/2011
Authors: Ravikiran Attota, Ronald G Dixson, John A Kramar, James Edward Potzick, Andras Vladar, Benjamin D. Bunday, Erik Novak, Andrew C. Rudack
Abstract: Through-focus scanning optical microscopy (TSOM) is a new metrology method that achieves 3D nanoscale measurement resolution using conventional optical microscopes; measurement sensitivities are comparable to what is typical using Scatterometry, SEM ...

9. Scanning Probe Microscope Dimensional Metrology at NIST
Published: 12/21/2010
Authors: John A Kramar, Ronald G Dixson, Ndubuisi George Orji
Abstract: Scanning probe microscopy (SPM) dimensional metrology efforts at the U.S. National Institute of Standards and Technology are reviewed. The main SPM instruments for realizing the International System of Units (SI) are the Molecular Measuring Machine, ...

Published: 10/19/2008
Authors: Jing Li, Yin-Lin Shen, Jaehwa Jeong, Fredric Scire, John A Kramar
Abstract: A compact, two-stage, vertical actuator with built-in sensors has been developed for the Molecular Measuring Machine (M3) and other potential precision instrumentation applications, such as scanning probe microscopy (SPM). In this article, we descri ...

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Looking for a NIST Special Publication (NIST SP Series)? Place the series number and dash in the report number field (Example: 800-) and begin your search.

  • SP 250-XX: Calibration Services
  • SP 260-XX: Standard Reference Materials
  • SP 300-XX: Precision Measurement and Calibration
  • SP 400-XX: Semiconductor Measurement Technology
  • SP 480-XX: Law Enforcement Technology
  • SP 500-XX: Computer Systems Technology
  • SP 700-XX: Industrial Measurement Series
  • SP 800-XX: Computer Security Series
  • SP 823-XX: Integrated Services Digital Network Series