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Displaying records 71 to 80 of 106 records.
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71. Optical Constants of In-Situ-Deposited Films of Important Extreme-Ultraviolet Multilayer Mirror Materials
Published: 7/1/1998
Authors: Charles S Tarrio, R N. Watts, Thomas B Lucatorto, J M Slaughter, Charles M Falco
Abstract: We have performed angle-dependent reflectance measurements of in-situ magnetron sputtered films of B^d4^C, C, Mo, Si, and W. The Fresnel relations were used to determine the complex index of refraction from the reflectance data in the region of appro ...

72. Optical Properties of Silicon and its Oxides,
Published: 1/1/1993
Authors: Charles S Tarrio, S E Schnatterly

73. Optics contamination studies in support of high-throughput EUV lithography tools
Published: 3/25/2011
Authors: Shannon Bradley Hill, Fardina Asikin, Lee J Richter, Steven E Grantham, Charles S Tarrio, Thomas B Lucatorto, Sergiy Yulin, Mark Schurmann, Viatcheslav Nesterenko, Torsten Feigl
Abstract: We report on optics contamination rates induced by exposure to broad-bandwidth, high-intensity EUV radiation peaked near 8 nm in a new beamline at the NIST synchrotron. The peak intensity of 50 mW/mm2 allows extension of previous investigations of c ...

74. Optics for Extreme Ultraviolet Lithography
Published: Date unknown
Authors: Steven E Grantham, Charles S Tarrio, Shannon Bradley Hill, Thomas B Lucatorto
Abstract: Extreme Ultraviolet Lithography (EUVL) is considered by many to be the next generation lithography that will fabricate integrated circuits in the next decade. Although EUVL is conceptually similar to optical or deep-UV lithography, it represents a m ...

75. Optics go to extremes in EUV lithography
Published: 1/1/2005
Authors: Steven E Grantham, Charles S Tarrio, Shannon Bradley Hill, Thomas B Lucatorto

76. Photon Damage and Absolute Photoluminescent Efficiency of Sodium Salicylate in the Soft X-ray Regime
Published: 1/1/1992
Authors: D E Husk, Charles S Tarrio, E L Benitez, S E Schnatterly

77. Photon Physics Home Page
Published: 5/1/1998
Authors: Uwe Arp, Charles S Tarrio
Abstract: The principal research activities of the Photon Physics Group are in the far ultraviolet and extreme ultraviolet [EUV] physics. In particular, we are currently pursing research activities in EUV optics, the development of x-ray microscopies, and nan ...

78. Pioneering use of Synchrotron Radiation Research as a spectroscopic and metrological tool at NBS
Published: 8/14/2015
Authors: Charles S Tarrio, Keith Codling, Ederer David, Uwe Arp, Charles W Clark, Thomas B Lucatorto
Abstract: Interest in the use of Synchrotron Radiation (SR) as a source of continuum in the extreme ultraviolet (EUV) spectral region was stimulated by the 1956 Physical Review article by Diran Tomboulian and Paul Hartman of Cornell University. In their all-t ...

79. Polymer Photochemistry at the EUV Wavelength
Published: 6/8/2010
Authors: Charles S Tarrio, Theodore Fedynyshyn, Russell Goodman, Alberto Cabral, Thomas B Lucatorto

80. Post-Polish Figuring of Optical Surfaces Using Multilayer Deposition, ed. by G. Kubiak and D. Kania
Published: 1/1/1996
Authors: Charles S Tarrio, E Spiller, C J Evans, Thomas B Lucatorto, Charles W Clark

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